Encapsulation structure of micro-nano bionic vector water sound sensor

Abstract

The invention relates to a micro-nano biomimetic vector acoustic sensor based on a micro-nano MEMS/NEMS processing technology and the bionics principle, in particular to an encapsulation structure of the micro-naro biomimetic vector acoustic sensor. By the encapsulation structure, the performance indexes of the vector acoustic sensor are further improved and perfected. The encapsulation structure comprises a supporting body used for fixing the micro-nano biomimetic vector acoustic sensor, an encapsulation shell which is sheathed the micro-nano biomimetric vector acoustic sensor and is fixed with the supporting body by sealing; the encapsulation shell is filled full of insulation liquid with the same or similar density as the water and is a transaudient rubber cap manufactured by a high-frequency, low-attenuation and low seepage polyurethane potting material by an acoustic potting technique. Designed according to the bionics principle and with reasonable structure, while protecting the micro-structure of the acoustic sensor, the encapsulation structure does not affect or hinder the detection to sound signals by the micro-structure of the acoustic sensor, thus realizing the purpose of further improving and perfecting the performance indexes of the vector acoustic sensor.

Description

Technical field [0001] The invention relates to a micro-nano bionic vector underwater acoustic sensor based on the micro-nano MEMS / NEMS processing technology and the principle of bionics, in particular to a packaging structure of the micro-nano bionic vector underwater acoustic sensor. Background technique [0002] With the development of science and technology today, the technological devices created by mankind are becoming increasingly complex and expensive, bulky and unreliable, and cannot meet the increasing requirements of industry, agriculture, medicine and military technology. This forces people to find new technological principles. . On the other hand, in the process of billions of years of evolution, organisms have survived and developed through severe natural selection and competition in the biological world. They have developed a unique ability, especially in the visual and auditory organs. The performance is extremely developed, and a set of extremely accurate navigat...

AI Technical Summary

Problems solved by technology

In this application, the microstructure of the resonant tunneling bionic vector underwater acoustic sensor is disclosed, but its microstructure cannot be directly placed in the environment to be tested for testing, and a certain pa...

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