Encapsulation structure of micro-nano bionic vector water sound sensor

Abstract

The invention relates to a micro-nano biomimetic vector acoustic sensor based on a micro-nano MEMS / NEMS processing technology and the bionics principle, in particular to an encapsulation structure ofthe micro-naro biomimetic vector acoustic sensor. By the encapsulation structure, the performance indexes of the vector acoustic sensor are further improved and perfected. The encapsulation structurecomprises a supporting body used for fixing the micro-nano biomimetic vector acoustic sensor, an encapsulation shell which is sheathed the micro-nano biomimetric vector acoustic sensor and is fixed with the supporting body by sealing; the encapsulation shell is filled full of insulation liquid with the same or similar density as the water and is a transaudient rubber cap manufactured by a high-frequency, low-attenuation and low seepage polyurethane potting material by an acoustic potting technique. Designed according to the bionics principle and with reasonable structure, while protecting themicro-structure of the acoustic sensor, the encapsulation structure does not affect or hinder the detection to sound signals by the micro-structure of the acoustic sensor, thus realizing the purpose of further improving and perfecting the performance indexes of the vector acoustic sensor.

Description

technical field [0001] The invention relates to a micro-nano bionic vector underwater acoustic sensor based on micro-nano MEMS / NEMS processing technology and the principle of bionics, in particular to a packaging structure of a micro-nano bionic vector underwater acoustic sensor. Background technique [0002] With the development of science and technology, the technical devices created by human beings are increasingly complex and expensive, bulky and unreliable, and cannot meet the increasingly high requirements of industry, agriculture, medicine and military technology, which forces people to find new technical principles . On the other hand, in the course of hundreds of millions of years of evolution, living things survive and develop through severe natural selection and competition in the biological world. They have developed a unique ability, especially in the visual and auditory organs. It is extremely developed, and a set of extremely precise navigation, positioning, ...

AI Technical Summary

Problems solved by technology

In this application, the microstructure of the resonant tunneling bionic vector underwater acoustic sensor is disclosed, but its microstructure cannot be directly placed in the environment to be tested for testing, and a certain packaging structure must be used, that is, the performance of the vector underwater acoustic sensor In addition to being affected by its microstructure, the index will also be affected by its microstructure and external packaging structure

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