Plasma resonant cavity waveguide assembly with heat insulating function

A plasma and waveguide device technology, applied in gaseous chemical plating, metal material coating process, coating, etc., can solve problems affecting the effective service life of microwave generators, damage microwave generators and their supporting devices, etc., to achieve Easy to implement, enhance the effect of cutting off heat radiation, and facilitate the effect of modification

Active Publication Date: 2008-01-23
YANGTZE OPTICAL FIBRE AND CABLE JOINT STOCK LIMITED COMPANY
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Problems solved by technology

Working for a long time under this condition will damage the microwave generator and its su

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  • Plasma resonant cavity waveguide assembly with heat insulating function

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Example Embodiment

[0010] The embodiment of the present invention will be further described below in conjunction with the accompanying drawings. It includes a microwave generator 1, an automatic tuner is configured in the microwave generator, and the microwave generator is connected to one end of a rectangular waveguide 2. The rectangular waveguide includes a horizontally arranged rectangular waveguide and A rectangular waveguide that is vertically bent and extends upwards. The cross-section of the rectangular waveguide is rectangular. A heat shield 8 that traverses the cross section of the inner cavity of the waveguide is arranged under the vertically arranged rectangular waveguide. The heat shield is made of high-temperature resistant non-metallic materials. Aluminum silicate refractory material or ceramic material with a metal impurity content of less than 0.01%, used to cut off heat radiation, but does not affect the transmission of microwaves, the thickness of the heat insulation board is 10-20...

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Abstract

The invention relates to a plasma resonator waveguide device with heat insulation function used for a PCVD optical fiber preform machining tool. The invention comprises a microwave generator, a wave guide and a plasma resonator; wherein, the microwave generator is conducted with the plasma resonator through the wave guide; the plasma resonator is arranged inside a heating furnace; the difference lies in that the waveguide internal cavity channel is provided with a heating separator. The invention can effectively prevent the heat radiation from entering into the microwave generator through the waveguide device without affecting the transmission of the microwave, which avoids the overheated state of the microwave generator and makes the microwave generator operate under a relative lower temperature, thus enhancing the service life of the microwave generator and the components thereof. The plasma resonator waveguide system is capable of working for longer time under a larger power, and further improves the effect of the PCVD process. The invention is simple in structure, easy to operation and convenient to refit the existing equipment.

Description

technical field [0001] The invention relates to a plasma resonant cavity waveguide device with heat insulation function for a PCVD optical fiber preform processing machine tool, which is an improvement on the existing plasma resonant cavity waveguide device. Background technique [0002] PCVD, or plasma chemical vapor deposition, is one of the main processes for processing optical fiber preforms. The processing mechanism of the PCVD process is the direct action of high-frequency microwaves on low-pressure mixed reactant gases, causing rapid physical and chemical reactions to form pure carbon dioxide. Silicon or doped silicon dioxide is deposited directly in the glassy state on the inner wall of the quartz tube. The PCVD process has the characteristics of flexibility and precision, and the plasma resonator microwave system is the core part of the PCVD processing equipment. The plasma resonant cavity microwave system consists of three parts: plasma resonant cavity, microwave ...

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Application Information

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IPC IPC(8): C23C16/50
Inventor 李震宇雷高清卢松涛李德祥
Owner YANGTZE OPTICAL FIBRE AND CABLE JOINT STOCK LIMITED COMPANY
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