Film coating bracket and film-plating machine

A coating machine and substrate clamping technology, which is applied in sputtering coating, conveyor objects, ion implantation coating, etc., can solve the problems affecting the coating quality, failure to accurately control the flip angle of the bracket, etc., and achieve the flip angle Control precise effects

Inactive Publication Date: 2009-02-11
HONG FU JIN PRECISION IND (SHENZHEN) CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the prior art, there are also some coating support automatic turning mechanisms, but most of them are simple mechanical control mechanisms, so it is impossible to accurately control the turning angle of the support, which in turn affects the coating quality

Method used

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  • Film coating bracket and film-plating machine
  • Film coating bracket and film-plating machine

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Embodiment Construction

[0011] The present invention will be further described in detail below in conjunction with the accompanying drawings.

[0012] Such as figure 1 As shown, the coating support 100 provided by the preferred embodiment of the present invention includes: a support body 110 and at least one substrate holder 120; each substrate holder 120 is correspondingly provided with a magnetic current control element 130, and the magnetic current control element 130 is used for To drive the corresponding substrate holder 120 to turn over.

[0013] The bracket body 110 is made of a metal semi-circular disk with good thermal conductivity, and its material can be copper, aluminum, stainless steel, or other metals. In this embodiment, the bracket body 110 is a stainless steel semi-circular disk.

[0014] The substrate holder 120 is also made of metal with good thermal conductivity, and the material can be copper, aluminum, stainless steel, or other metals. The shape of the substrate holder 120 may be f...

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PUM

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Abstract

The invention provides a filming support which comprises a support body and at least a substrate fixture, each substrate fixture is connected with the support body by a rotating shaft, the rotating shaft connecting with each substrate fixture is provided with a first gear, each substrate fixture is correspondingly provided with a magnetic current control element, and each magnetic current control element can drive a second gear meshed with the first gear, therefore, the rotating shaft is driven to rotate and the substrate fixture is driven to turn over. The filming support has the advantages of the automatic turnover of the filming substrate fixture and the precision control of the turnover angle. A film plating machine with the filming support is also provided.

Description

Technical field [0001] The invention relates to a coating device, in particular to a coating support and a coating machine. Background technique [0002] At present, many industrial products are coated with functional films on the surface to improve the various properties of the product surface. For example, an anti-reflection film is coated on the surface of the optical lens to reduce the reflectivity of the lens surface and reduce the energy loss of incident light passing through the lens. Another example is to plate a layer of filter film on the surface of some filter elements, which can filter out the light of a certain predetermined waveband and make various filters. [0003] At present, due to the ever-increasing requirements for optical performance, many optical lenses or filters need to be coated on both sides of the surface of optical workpieces. For example, because the image sensor in the lens of a mobile phone digital camera, such as a charge-coupled sensor, generates...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/54C03C17/00B65G49/05
CPCB29D11/00865C23C14/505B05B13/0221
Inventor 陈杰良简士哲王仲培
Owner HONG FU JIN PRECISION IND (SHENZHEN) CO LTD
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