Film coating bracket and film-plating machine
A coating machine and substrate clamping technology, which is applied in sputtering coating, conveyor objects, ion implantation coating, etc., can solve the problems affecting the coating quality, failure to accurately control the flip angle of the bracket, etc., and achieve the flip angle Control precise effects
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0011] The present invention will be further described in detail below in conjunction with the accompanying drawings.
[0012] Such as figure 1 As shown, the coating support 100 provided by the preferred embodiment of the present invention includes: a support body 110 and at least one substrate holder 120; each substrate holder 120 is correspondingly provided with a magnetic current control element 130, and the magnetic current control element 130 is used for To drive the corresponding substrate holder 120 to turn over.
[0013] The bracket body 110 is made of a metal semi-circular disk with good thermal conductivity, and its material can be copper, aluminum, stainless steel, or other metals. In this embodiment, the bracket body 110 is a stainless steel semi-circular disk.
[0014] The substrate holder 120 is also made of metal with good thermal conductivity, and the material can be copper, aluminum, stainless steel, or other metals. The shape of the substrate holder 120 may be f...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com