Static pressure air-float guide rail based on double-side symmetrical damp

Abstract

A static pressured air-float guide rail based on bilateral symmetric damping belongs to the technical field of the precision instrument and measurement. In view of the characteristics of small driving force and large inertia of the air-float guide rail, and according to the properties of step response and shock response of a closed loop control system of the guide rail, a two-way viscous damper is introduced to the system to constitute a part for rate feedback, so that the shortage of damping effect of a differential parameter in a PID controller is relieved, thus increasing the damping ratio of the system, reducing movement over-control, and eliminating proper vibrations caused by random disturbance. Two viscous dampers with the same parameter are symmetrically arranged at the two ends of an air-float cover to form a two-way viscous damper; the intensity of the damping force is proportional to the speed of the air-float cover; the direction of the damping force is aligned with the movement direction of the air-float cover; and the damping coefficient is accurate and adjustable, so that the movement over-control of the guide rail and the proper vibration in the movement direction after positioning are reduced, and the positioning precision and static stability of the guide rail are increased by about one order of magnitude.

Description

technical field [0001] The invention belongs to the technical field of precision instruments and measurement, in particular to a static pressure air-floating guide rail based on double-sided symmetrical damping. Background technique [0002] As a high-precision guiding and positioning mechanism, the static pressure air bearing guide rail is widely used in various large precision instruments and equipment. The air-floated guide rail is averagely affected by the air film in the vertical direction of motion, which can better constrain its degree of freedom. Through precision grinding, pressure equalization and compound throttling technologies, it can achieve high guiding accuracy; but in the direction of motion, due to the It has the characteristics of small driving force and large inertia. At the same time, the transmission mechanism composed of motor, ball screw and elastic coupling also has defects such as transmission clearance, elastic deformation, stress deformation, fric...

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Problems solved by technology

[0006] Aiming at the problems of the existing static pressure air flotation guide rails that the vibration attenuation time is too long, the system is difficult to stabilize and the shortcomings of the existing solutions, a static pressure air flotation guide rail based on double-sided symmetrical damping is provided, which can be used without loss Under the premise

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