FFS type TFT-LCD array substrate structure and manufacturing method thereof
A technology of array substrate structure and manufacturing method, which is applied in semiconductor/solid-state device manufacturing, photoengraving process of pattern surface, instruments, etc., and can solve problems such as yield reduction, gate line-transparent electrode short circuit, quality problems, etc.
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[0037] figure 1 It is a schematic diagram of the structure of the FFS type TFT-LCD array substrate of the present invention, figure 2 for figure 1 Middle A-A sectional view. like figure 1 , figure 2 As shown, the array substrate structure of the present invention includes a glass substrate 1, and gate electrodes 2, gate lines 10, common electrode lines 3 and transparent electrodes 4 are formed on the glass substrate, and the gate lines 10 and common electrode lines 3 are arranged in isolation. It is connected with the transparent electrode 4 to form a common electrode. The gate insulating layer 5 is formed on the glass substrate and covers the gate electrode 2, the gate line 10, the common electrode line 3 and the transparent electrode 4. The active layer 6 and the source-drain electrode layer 7 are sequentially formed on the On the glass substrate and above the gate electrode 2, the source-drain electrode layer 7 includes the source electrode, the drain electrode and th...
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