Method for preventing memory array generating bit line interference
Patent Information
- Authority / Receiving Office
- CN Β· China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- SEMICON MFG INT (SHANGHAI) CORP
- Publication Date
- 2010-12-22
Smart Images
Figure 1 Figure 2 Figure 3
Abstract
Description
technical field
[0001] The invention relates to the erasing and writing technology of data of semiconductor devices, in particular to a method for preventing bit line interference from non-volatile memory arrays. Background technique
[0002] Nonvolatile memory (nonvolatile memory) is a commonly used semiconductor device. According to different materials and structures, nonvolatile memory can be divided into many types. Taking nitrogen read-only memory (NROM) as an example, it has such figure 1 The device structure shown includes: a substrate 1, a source 2 and a drain 3 formed in the substrate 1, and a gate 4 formed above the substrate 1, wherein the gate 4 and the substrate 1 There are also three superimposed insulating layers 51, 52, 53 between them, the middle layer 52 is a charge-trapping layer for storing data, and the insulating layers 51, 53 on the upper and lower sides are used to lock the middle Layer 52 charges. Two ends of the charge trapping layer 52 have char...