Thermostatic device and control method thereof

A technology of constant temperature device and temperature controller, applied in the direction of temperature control, non-electric variable control, control/regulation system, etc. The effect of low manufacturing cost and simple structure

Inactive Publication Date: 2009-03-11
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The disadvantage of the aforementioned control mode is that it consumes a lot of energy, that is, it uses high energy consumption in exchange for temperature stability.
When the equipment is in the standby state, the raw material constant temperature storage device does not need high temperature stability...

Method used

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  • Thermostatic device and control method thereof
  • Thermostatic device and control method thereof
  • Thermostatic device and control method thereof

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Embodiment Construction

[0031] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with a specific embodiment (raw material storage constant temperature device for MOCVD equipment) and with reference to the accompanying drawings.

[0032] Such as figure 1 and 2 As shown in , the constant temperature device includes the following components: control unit 1; temperature sensor 2; heater 3; refrigerator 4; The raw material bottle that is used to hold the liquid and is buried under the liquid surface can contain different liquids according to the actual raw materials stored; the agitator 5, the blade of the agitator 5 is driven by a deceleration motor (not shown) to rotate, so as to Make the temperature of the liquid in the whole constant temperature bath 6 uniform. The deceleration motor is fixed on the bracket (not shown) under the constant temperature tank, and drives the stir...

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Abstract

The invention relates to the technical field of semi-conductor material growth, and discloses a thermostatic device, which comprises a heater, a freezer, a stirrer, a temperature sensor and a control unit, wherein, the control unit comprises a PID temperature controller and a switching mode temperature controller; according to the temperature measured by the temperature sensor, the PID temperature controller controls the power of the heater by PID algorithm so as to adjust the temperature of the thermostatic device; and the switching temperature controller adjusts the temperature of the thermostatic device by opening or closing the heater or the freezer. The invention simultaneously discloses a method for controlling the thermostatic device. By adopting the device and the method, energy saving can be realized when meeting the temperature accuracy of the thermostatic device, in particular to a raw material storage thermostatic device.

Description

technical field [0001] The invention relates to the technical field of semiconductor material growth, in particular to a constant temperature device for raw material storage and a control method for the constant temperature device. Background technique [0002] In the metal-organic chemical vapor phase epitaxy (MOCVD) equipment used for the growth of semiconductor materials, the raw materials are kept in a device with a relatively constant temperature, and temperature fluctuations will affect the parameters of the grown material, thus deviating from the expected experimental purpose . Such as image 3 As shown in , the raw material storage constant temperature device of general MOCVD equipment includes a proportional-integral-differential (PID) temperature controller and a constant temperature bath, and a temperature sensor, a heater, a refrigerator and a stirrer are installed in the constant temperature bath, and its The temperature control mode is: keep the refrigerator i...

Claims

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Application Information

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IPC IPC(8): B01L7/00G05D23/00
Inventor 张日清刘祥林杨少延张晓沛董向芸
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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