Active matrix driven grating light modulator

An optical modulator and active matrix technology, which is applied in the field of grating optical modulators, can solve the problems of low light utilization and low contrast, and achieve the effects of improving contrast, eliminating cross effects, and reducing dynamic response time requirements

Inactive Publication Date: 2009-03-11
CHONGQING UNIV
View PDF1 Cites 4 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] In order to overcome the shortcomings of the passive matrix-driven grating light modulator, such as cross effects, low contrast, and low light utilization, the present invention proposes an active matrix-driven grating light modulator, which consists of the lower active matrix It is composed of the grating light modulator on the upper layer. By controlling the output voltage of the active matrix, the control of the voltage of the grating light modulator can be realized, thereby realizing the modulation of light

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Active matrix driven grating light modulator
  • Active matrix driven grating light modulator
  • Active matrix driven grating light modulator

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0021] Below in conjunction with accompanying drawing and embodiment the present invention is further described:

[0022] In Figure 1(a) and Figure 1(b), the processing technology of the grating light modulator driven by the active matrix: first, the active matrix unit 1 is processed on the silicon substrate by using the CMOS process; then the oxide layer 2 is deposited , etch the through hole 6; then use chemical mechanical polishing technology (CMP) to polish, deposit and etch the lower electrode 3 of the grating light modulator; then deposit the insulating layer 4; finally, use the surface micromachining technology to form a movable upper layer Grating 5. The through hole 6 connects the upper layer MEMS grating light modulator and the lower layer active matrix unit 1, so that independent control of each grating light modulator can be realized. The active matrix driven grating light modulator eliminates the cross effect existing in the passive matrix driven grating light mo...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention relates to a grating light modulator, which is driven by an active matrix and consists of a grating light modulator at the upper layer and the active matrix for drive at the lower layer. A scanning signal wire and a data signal wire are respectively connected to the grid and drain of a switching tube in the active matrix, the output end of the active matrix is connected to the bottom electrode of the grating light modulator, the top electrode of grating light modulator is grounded. The output voltage of the active matrix equals the voltage of the grating light modulator. When the scanning signal wire is at high level, the active matrix is started, and the data signal wire updates the output voltage of the active matrix; when the scanning signal wire is at low level, the active matrix is cut off, the output voltage of the matrix remains unchanged. Thus, the control over the move status of the grating light modulator can be realized by controlling the output voltage of the active matrix to be updated or maintained. The grating light modulator can cancel cross effect, improve optical contrast and light utility rate and truly serve for projected display with high definition and high resolution.

Description

technical field [0001] The invention relates to an active matrix driven grating light modulator, more specifically, the invention controls the voltage of the MEMS grating light modulator through the active matrix to realize light modulation. Background technique [0002] With the continuous development and maturity of MEMS (Micro-Electro-Mechanical Systems) technology, a light modulator for projection display based on optical MEMS technology has been proposed. Among these optical modulators, digital micromirror devices (DMDs) and grating light valves (GLVs) are representative. They have been used with great success in commercial applications. [0003] DMD is a modulator composed of millions of deflectable reflective micromirrors manufactured by MEMS technology. The tight gap of the DMD micromirror makes the projected image produce a more detailed and seamless picture. The DMD responds quickly, and the contrast, brightness, and uniformity are all very good. The difference...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Applications(China)
IPC IPC(8): G02B26/08
Inventor 张智海金珠王宁张洁韦玮
Owner CHONGQING UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap