Center aligning assembling and regulating apparatus and method for optical system

Abstract

The invention provides a device for aligning, assembling and adjusting optical systems and a method thereof. The device comprises an auto-collimate microscope and a turntable with an air bearing, wherein the optical axis of the auto-collimate microscope is accurately aligned with a rotation shaft of the air bearing, the auto-collimate microscope comprises a lighting module, a mask board with carved lines, a beam splitter prism, a focusing objective lens group, a microscope objective lens group, a spectroscope, a measurement reticule, a CCD and a microscope eyeglass group, to confirm the eccentricity measurement accuracy and lens assembly and adjustment accuracy of the device. The device can be applied in high accuracy centering machines to fit the high accuracy air bearings, thereby effectively improving the centering accuracy of the centering machines and satisfying the lens assembly and adjustment demands of high accuracy optical systems.

Description

technical field [0001] The invention relates to the field of optical systems, and in particular to a device and method for centering and adjusting the optical system. Background technique [0002] The center deviation defect of the optical system seriously affects the quality of optical instruments and affects the theoretical basis of optical design - the coaxial theory, resulting in a decline in the imaging quality of the optical system. Therefore, the design and manufacture of high-precision centering equipment is to ensure that the optical axes of each lens of the optical lens are consistent, thereby reducing the center deviation generated during the lens assembly process. The principle of center deviation is as follows figure 1 shown. For high-precision optical systems, especially the assembly of lithography lenses, the eccentricity should be guaranteed to be on the order of microns, which can only be guaranteed by real-time monitoring of high-precision centering equip...

AI Technical Summary

Problems solved by technology

The utility model patent CN201016713 introduces an optical centering instrument with an air bearing turntable. Its main feature is that a high-precision air bearing turntable is provided, but the specific structure and measurement accuracy of the optical imaging part are not given.

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