Circuit system with supply voltage for driving an electromechanical switch
A technology of electrical systems and circuits, applied in the direction of protection switches, electrical switches, electrostatic relays/electro-adhesion relays using micro-machines, etc., can solve the problems of expensive, large volume, dense area, etc.
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[0015] Currently, micro-electromechanical systems (MEMS) generally refer to micron-scale structures, which can integrate multiple different elements, such as mechanical elements, electromechanical elements, sensors, actuators, and electronic devices, on a common substrate, for example, by microfabrication techniques. Switching technologies for MEMS applications include semiconductor devices, such as power field effect transistors (FETs) and insulated gate bipolar transistors (IGBTs), and include MEMS switches that are electromechanical in nature. An example of a MEMS switch includes a gate that controls an electrostatically actuated beam. The beam can be shifted between two positions to make the switch conductive or non-conductive.
[0016] Such MEMS switches have substantially different requirements than semiconductor switches, which typically require a gate drive for low voltage startup, eg less than 18V. On the other hand, current MEMS switches require relatively high volt...
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