Method for implementing PMMA three-dimensional fine process for mobile example platform

A sample platform and sample platform technology, which are applied in chemical instruments and methods, microstructure technology, microstructure devices, etc., to achieve the effects of simple three-dimensional graphics, flexible manufacturing methods, and overcoming the complexity and high cost of devices

Inactive Publication Date: 2009-03-25
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

It can effectively overcome the shortcomings of the complexity and high cost of the device in the method of manufacturing inclined samples, and the shortcomings of simple three-dimensional graphics in the method of changing the distance between masks, and is suitable for manufacturing three-dimensional structures with narrow top and wide bottom.

Method used

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  • Method for implementing PMMA three-dimensional fine process for mobile example platform
  • Method for implementing PMMA three-dimensional fine process for mobile example platform
  • Method for implementing PMMA three-dimensional fine process for mobile example platform

Examples

Experimental program
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Effect test

Embodiment 1

[0020] first step, such as figure 1 As shown, the high-energy cyclotron beam emits X-rays, and the total length of the X-ray beam is 1.58m. 200μm thick beryllium and 50μm thick Capeton window (5mm×30mm) are used to form a filter to obtain hard X-rays with photon energy exceeding 1.3keV. The filtered hard X-rays are irradiated onto the sample through the X-ray mask, and the sample platform fixes the sample and can realize two-dimensional translation.

[0021] The second step is to use a reticle to precisely control the exposure time by moving the sample stage and changing the time of staying in different positions, so as to control the total amount of X-ray incident at different positions. The total amount of X-ray incidence at a certain position is proportional to the etching depth of PMMA at this position, so that a three-dimensional PMMA structure with a narrow top and a wide bottom is formed by parts with different depths.

[0022] Such as figure 2 As shown, the manufac...

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Abstract

The present invention discloses a method for realizing PMMA three-dimensional micromachining by moving a sample platform, which belongs to the field of micromachining. An X-ray beam sequentially passes through an X-ray filter and an X-ray mask plate and then irradiates a sample. The sample platform fixes the sample and can be achieve two-dimensional translation. The exposure time is accurately controlled through one mask plate by moving the sample platform and changing the time for staying on different positions, so the total incidence amount of the X-ray at different positions is controlled. The exposure amount of the X-ray is varied at different positions, so the etch depth of PMMA is varied at the different positions and a three-dimensional PMMA structure with a narrower upper part and a wider lower part formed by parts with different depths is obtained. The structures with different depths can be obtained just by controlling the X-ray exposure amount and moving the sample platform, thus the shortcomings that the devices used in the manufacturing method of inclining samples are complex and costly and the three-dimensional graphics used in the method by changing the spacing of the masks is simple are overcome.

Description

technical field [0001] The invention relates to a processing method in the technical field of microelectronics manufacturing, in particular to a method for realizing PMMA (polymethylmethacrylate) three-dimensional micromachining on a mobile sample platform. Background technique [0002] Micro-components are of great significance to the trend of device miniaturization. The surface processing of micro-components plays a key role in the performance and three-dimensional structure of MEMS devices. Many micro-optical devices require surface processing, which will improve their performance. Therefore, it is necessary to invent a method to manufacture micro-components with controllable depth (curved surface). On the other hand, in order to grasp the failure behavior of microcomponents in three dimensions, a large number of cylinder patterns with different depths and widths are required to conduct a series of pressure tests. The existing technology generally uses the etching metho...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/00G03F7/20B81C5/00B81C99/00
Inventor 李以贵高阳张俊峰
Owner SHANGHAI JIAO TONG UNIV
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