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MEMS resonator having at least one resonator mode shape

A resonator and resonator mode technology, applied in MEMS oscillators, MEMS filters, and the field of manufacturing such MEMS resonators, to achieve the effect of easy manufacturing and good power handling

Active Publication Date: 2009-04-01
NXP BV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, processes like HARPPS or BOSCH for manufacturing MEMS resonators can no longer be used

Method used

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  • MEMS resonator having at least one resonator mode shape
  • MEMS resonator having at least one resonator mode shape
  • MEMS resonator having at least one resonator mode shape

Examples

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Embodiment Construction

[0043] The present invention has been described with reference to certain drawings and according to particular embodiments but the invention is not limited thereto but only by the claims. Any reference signs in the claims should not be construed as limiting the scope. The described drawings are only schematic and not restrictive, and in the drawings, the size of some elements are exaggerated for the purpose of illustration and are not drawn to scale. Where the term "comprising" is used in the description and claims of the present invention, it does not exclude other elements or steps. Where an indeterminate or definitive term is used, when referring to a singular noun (eg, "a," "the"), this includes a plurality of that noun unless stated otherwise.

[0044] Furthermore, the terms first, second, third and similar terms in the description and claims are used to distinguish between similar elements and not necessarily to describe an order or sequence. It is to be understood tha...

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Abstract

The invention relates to a MEMS resonator having at least one mode shape comprising: a substrate (2) having a surface (12), and a resonator structure (1), wherein the resonator structure (1) is part of the substrate (2), characterized in that the resonator structure (1) is defined by a first closed trench (3) and a second closed trench (3), the first trench (3) being located inside the second trench (3) so as to form a tube structure (1) inside the substrate (2), and the resonator structure (1) being released from the substrate (2) only in directions parallel to the surface (12). The invention further relates to a method of manufacturing such a MEMS resonator.

Description

technical field [0001] The invention relates to a MEMS resonator having at least one cavity mode shape, said MEMS resonator comprising a substrate having a surface and a resonator structure. The invention also relates to methods of manufacturing such MEMS resonators. The invention also relates to a MEMS oscillator comprising such a MEMS resonator. The invention also relates to a MEMS filter comprising such a MEMS resonator. Background technique [0002] To replace bulky quartz crystals used in oscillators (or filters), various MEMS resonator geometries and fabrication processes have been reported in the literature. Integration in semiconductor processes allows for dramatic size and cost reductions. [0003] MEMS resonators are made of polysilicon or single crystal silicon. Compared to polysilicon, monocrystalline silicon is more attractive due to its low internal friction and consequently higher mechanical quality factor, low internal stress and independence from various...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/02
CPCH03H9/2405H03H9/505H03H3/0076H03H2009/02503H03H9/02259
Inventor 马克·斯沃洛斯基帕特里·加芒帕斯卡·菲利普
Owner NXP BV
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