System and method for testing electric resistivity of thin film thermoelectricity material

Abstract

The invention relates to a thin-film thermoelectric material resistivity test system and a method. The test system adopts a new thin-film thermoelectric material resistivity test instrument which is based on the principles of dual electro-testing and four probes to test the resistivity of a thin film thermoelectric material and is composed of a test fixture and a control and test circuit system. A thin film thermoelectric material sample to be tested is arranged in the test fixture, and the test fixture is connected with the control and test circuit system by a probe guide wire. The control and test circuit system gives pulse current signals to two of the four probes in the test fixture by the probe guide wires and collects voltage response signals between another two probes, the pulse current signals and the voltage response signals are simultaneously input in a micro-computer, and the real-time resistivity of the thin film thermoelectric material at the tested position is displayed on a display screen of the micro-computer. The test system and the method can greatly reduce the impacts of the distances among the probes and the transverse wandering of the probe tips on the resistivity test result, and the test precision can not be affected even the tested piece is smaller and the probes are positioned in the vicinity of the sample boundary.

Description

technical field [0001] The invention relates to the field of thermoelectric materials, in particular to a resistivity testing system and method for thin-film thermoelectric materials. Background technique [0002] Thermoelectric material is a kind of functional material that can realize mutual conversion between thermal energy and electric energy, and it has a wide range of applications in thermoelectric power generation, refrigeration and sensors. Resistivity is an important parameter to evaluate the performance of thermoelectric materials. [0003] The resistivity test of thin film materials usually adopts the four-probe method. Conventional four-probe resistivity meters are designed for conducting or semiconducting materials. For thin-film thermoelectric materials, due to the Peltier effect generated by the current flowing inside the thin-film sample during the resistivity test process, the test accuracy of the resistivity is seriously affected. The conventional four-pr...

AI Technical Summary

Problems solved by technology

If the geometric size of the measured sample is limited compared with the probe spacing, the measurement results must be corrected, and the correction coefficients when measuring the edge position of the sample are different, which seriously affects the test accuracy

In addition, the measurement results of conventional four-probe resistivity meters are also affected by probe spacing and probe mobility

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