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Drawing method, drawing apparatus, and information recording medium

A technology of information recording and media, applied in the direction of recording/reproducing by optical method, exposure device of photographic plate making process, data recording, etc., which can solve the problem of insufficiency

Inactive Publication Date: 2009-08-12
RICOH KK +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, drawing methods and devices according to the prior art are not sufficient for drawing patterns at high speed with sufficient precision on the surface of a recording medium.

Method used

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  • Drawing method, drawing apparatus, and information recording medium
  • Drawing method, drawing apparatus, and information recording medium
  • Drawing method, drawing apparatus, and information recording medium

Examples

Experimental program
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Embodiment Construction

[0029] A description is given of embodiments of the present invention with reference to the drawings.

[0030] figure 1 The structure of the vacuum drawing apparatus 100 in the embodiment of the present invention is shown. Vacuum drawing device 100 is set to 10 for example vacuum degree -4 Electron beams are irradiated in an environment of Pa onto a disk-shaped substrate W in which a drawing surface is formed by coating a photoresist material so that a pattern of extremely fine lines is drawn on the drawing surface of the substrate W superior.

[0031] Such as figure 1 As shown, the vacuum drawing device 100 generally includes a turntable unit 30, an irradiation device 10, a transport unit 40, a first vacuum chamber 50, a gate valve 52, a second vacuum chamber 53 and a main control unit (not shown).

[0032] The substrate W is placed on the turntable unit 30 . The irradiation device 10 irradiates the surface of the substrate W with an electron beam. The transfer unit 40 ...

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Abstract

In a drawing method and device, an electron beam is radiated to a surface of an object to draw a pattern along scan lines on the surface of the object. A pattern is drawn along the scan lines on the surface of the object by the electron beam through relative movement of the object relative to the electron beam. The electron beam is deflected at a speed that does not cause a pattern to be formed on the object surface, in one of a first direction intersecting the scan lines and a second direction opposite to the first direction, without performing blanking of the electron beam, so that a beam spot of the deflected electron beam is positioned to one of the scan lines on the object surface. The drawing step and the deflecting step are repeated alternately.

Description

technical field [0001] The invention relates to a drawing method, a drawing device and an information recording medium. More specifically, the present invention relates to a drawing method and a drawing apparatus in which electron beams are irradiated onto the surface of an object to draw a pattern on the surface of the object. And the present invention relates to an information recording medium in which a pattern is formed on a recording surface using a drawing method and apparatus. Background technique [0002] In recent years, in the field of information digitization, there has been an increasing demand for a large storage capacity of optical disks. Research and development of next-generation optical discs, on which, for example, information is recorded and reproduced using irradiated ultraviolet light beams of the order of 400 nm in wavelength, to replace existing optical discs such as CDs (Compact Discs) or DVDs (Digital Versatile Discs), are rapidly being developed. ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G11B7/26G11B9/10G11B5/84G03F7/20H01J37/317
CPCB82Y10/00H01J37/3174G11B9/10G11B5/743G11B5/855G11B5/82B82Y40/00G11B7/261G11B7/26G11B7/0045
Inventor 宫崎武司村山升
Owner RICOH KK