Air discharge collector and vacuum-pumping processing equipment

Abstract

The invention relates to exhaust collector and vacuum exhaust processing apparatus. An exhaust collector (1) has a tail pipe insertion chamber (5) that accepts the tail pipe (4), an expanding closed-loop (7) that is exposed in full periphery of inner side of the tail pipe insertion chamber (5) and seals a gap between the tail pipe insertion chamber (5) and the tail pipe (4) by using raise of inner pressure, a sleeve (8) that is communicated with the expanding closed-loop (7) and surrounds the tail pipe insertion chamber (5), a vacuum exhaust flow path (11) that exhausts inner gas of the tail pipe insertion chamber (5), a cooling water supply flow path (12) that supplies cooling water in the sleeve (8) and a cooling water exhaust flow path (13) that exhausts the cooling water from the sleeve (8).

Description

technical field [0001] The invention relates to an exhaust manifold and a vacuum exhaust treatment device. Background technique [0002] In the manufacturing process of the plasma display panel, etc., a vacuum exhaust device is used, in which an exhaust header is attached to the tail pipe attached to the product to evacuate the vacuum. [0003] For example, in Patent Document 1, it is described as Figure 5 Shown is a conventional exhaust header 42 for a vacuum exhaust device for evacuating a plasma display panel 41 . The conventional exhaust header 42 includes: a cup-shaped member 45 that defines a tail pipe insertion chamber 44 that receives a tail pipe 43, is installed at the mouth of the tail pipe insertion chamber 44, and is inflated by supplying pressurized air to the cup-shaped member. The expansion sealing ring 46 that seals the gap between the component 45 and the tail pipe 43, and the outer periphery of the cup-shaped component 45 and the expansion sealing ring 46...

AI Technical Summary

Problems solved by technology

[0005] Since the process is performed in a heating furnace, the four flexible pipes connected to the exhaust header 42 are required to have heat resistance, so the flexibility is not enough

Therefore, these flexible pipes limit the movable range of the exhaust manifold 42, making it difficult to adjust the movement of the exhaust manifold 42.

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