Micro-electromechanical vector hydrophone
A vector hydrophone, micro-electromechanical technology, applied in radio wave measurement systems, instruments, measurement devices, etc., can solve problems such as overall performance improvement, and achieve the effects of increasing deformation amplitude, improving response, and reducing energy loss
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[0019] The micro-electromechanical vector hydrophone includes a sensitive conversion microstructure, a support body 1 for fixing the sensitive conversion microstructure, an encapsulation shell that is covered outside the sensitive conversion microstructure and sealed and fixed with the support body 1, and the sensitive conversion microstructure is contained in The middle part of the semiconductor substrate is etched with a semiconductor body etching technology to form a cross-shaped cantilever beam structure 2 and a micro-pillar 3 with a density similar to that of water. The micro-column 3 is vertically fixed in the center of the cross-shaped cantilever beam structure 2. The four-beam end of the zigzag cantilever beam structure 2 is provided with a conversion element 4, and the package shell is a sound-permeable rubber cap 5 made of a polyurethane potting material with high frequency, low attenuation and low water seepage through an acoustic potting process. The top of the acou...
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