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Vacuum evaporation processing equipment

A processing device and steam technology, which is applied in vacuum evaporation plating, electrical components, ion implantation plating, etc., can solve the problem that the supply cannot be adjusted, and achieve the effect of simple structure

Active Publication Date: 2012-05-23
ULVAC INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, there is a problem that the supply amount of metal atoms in the metal vapor atmosphere at a certain temperature to the treated object cannot be adjusted.

Method used

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  • Vacuum evaporation processing equipment
  • Vacuum evaporation processing equipment
  • Vacuum evaporation processing equipment

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0054] As a sintered magnet of the Nd-Fe-B system, the composition is 30Nd-1B-0.1Cu-2Co-bal.Fe, the oxygen content of the sintered magnet itself is 500PPm, the average crystal grain size is 3μm, and it is processed into φ40× 10mm cylindrical workpiece. In this case, after finishing the surface of the fired magnet S to have a surface roughness of 100 μm or less, it is pickled with an etching solution and then washed with water.

[0055] Next, using the vacuum vapor treatment device 1 described above, the Dy atoms are attached to the surface of the fired magnet S by the above method, and the Dy atom is diffused into the grain boundary phase before the Dy film is formed on the surface of the fired magnet S to obtain a permanent magnet M (vacuum vapor treatment) . In this case, while the sintered magnet S is placed on the supporting portion 21a in the processing chamber 20, Dy with a purity of 99.9% is used as the metal evaporation material, and a total of 10 g of bulk Dy is placed ...

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Abstract

There is provided vacuum evaporation processing equipment having a simple structure capable of adjusting an amount of evaporated metal atoms supplied to a processing object. The vacuum evaporation processing equipment comprises a vacuum chamber (12) capable of maintaining a predetermined pressure, a processing container (2) and an evaporation container (3) provided so as to be isolated from the vacuum chamber and mutually communicated with each other, and heating means (6a, 6b) capable of heating the processing container and the evaporation container in a status where a processing object is disposed in the processing container and a metal evaporation material (V) is disposed in the evaporation container. The vacuum evaporation processing equipment is so configured that the heating means heats the processing container and the evaporation container to evaporate the metal evaporation material while raising the temperature of the processing object up to a predetermined temperature, thereby supplying the evaporated metal atoms to the surface of the processing object in the processing container.

Description

Technical field [0001] The present invention relates to a vacuum processing device for performing vacuum vapor processing, which evaporates a metal evaporation material while heating a processed object in a processing chamber, and causes the vaporized metal atoms to adhere and deposit on the surface of the processed object at a predetermined temperature to form metal The film, in addition, when the object to be processed has a crystalline structure, metal atoms can be allowed to diffuse into the grain boundary of the object while adhering to the surface of the object. Background technique [0002] As is well known, this type of vacuum steam treatment device is used to improve the magnetic properties of, for example, Nd-Fe-B based sintered magnets, and is composed of a sealed container such as a glass tube and an electric furnace. This kind of vacuum vapor processing device contains the Nd-Fe-B based sintered magnet and other processed objects in a mixed state in a sealed containe...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/24H01F41/02
CPCC23C14/243H01F41/0266H01F1/0577C23C14/18H01F41/0293C23C14/24C23C14/56H01F1/06
Inventor 永田浩新垣良宪
Owner ULVAC INC