Aspheric aperture splicing measuring device based on spherical air-bearing shafts

Abstract

The invention relates to an aspheric aperture splicing measuring device based on spherical air-bearing shafts, belonging to the technical field of optical detection. A spherical air-bearing table and The invention relates to an aspheric aperture splicing measuring device based on spherical air-bearing shafts, belonging to the technical field of optical detection. A spherical air-bearing table anda guide rail pair is movably connected with the support mechanism fixed on the air-bearing shaft base by a bearing, and the step motor is fixed on the second guide rail pair and movably connected withd guide rail pair is movably connected with the support mechanism fixed on the air-bearing shaft base by a bearing, and the step motor is fixed on the second guide rail pair and movably connected withthe circular guide rail. The device has the advantages of simple mechanism and lower motion precision requirement and restricts the influence of the environmental vibration and the deformation of a p the circular guide rail. The device has the advantages of simple mechanism and lower motion precision requirement and restricts the influence of the environmental vibration and the deformation of a part to be measured on measuring results.art to be measured on measuring results. gantry support are mounted on a vibration-isolating support, a linear air-bearing guide rail is fixed in the center of the gantry support, and an optical wave-surface interferometer is arranged at ta gantry support are mounted on a vibration-isolating support, a linear air-bearing guide rail is fixed in the center of the gantry support, and an optical wave-surface interferometer is arranged at the lower end of the linear air-bearing guide rail; the spherical air-bearing table comprises spherical air-bearing shafts, an air-bearing shaft base, a rotating motor, a step motor, a circular guide rhe lower end of the linear air-bearing guide rail; the spherical air-bearing table comprises spherical air-bearing shafts, an air-bearing shaft base, a rotating motor, a step motor, a circular guide rail, a first guide rail pair, a second guide rail pair and a support mechanism; the circular guide rail is fixed on the desktop of the spherical air-bearing shafts, and the first guide rail pair and tail, a first guide rail pair, a second guide rail pair and a support mechanism; the circular guide rail is fixed on the desktop of the spherical air-bearing shafts, and the first guide rail pair and the second guide rail pair are symmetrically arranged on the circular guide rail; the first guide rail pair is in rigid connection with the rotating motor fixed on the air-bearing shaft base, the seconhe second guide rail pair are symmetrically arranged on the circular guide rail; the first guide rail pair is in rigid connection with the rotating motor fixed on the air-bearing shaft base, the second

Description

technical field [0001] The invention belongs to the technical field of optical detection, and mainly relates to an aspheric surface sub-aperture splicing measurement device based on a spherical air bearing shaft, which is a high-precision, high-efficiency, economical large-caliber aspheric surface sub-aperture splicing interference measurement device. Background technique [0002] Aspherical optical components have the advantages of improving the imaging quality of the system, correcting aberrations, increasing the relative aperture of the system, and expanding the field of view. Light energy is lost, so it has been more and more widely used in modern optical systems. Especially in the fields of space cameras, astronomical telescopes, ground-based space target detection and recognition, laser weapon systems, and inertial confinement fusion, aspheric devices have become key components that determine system performance. [0003] In order to seek a low-cost high-resolution det...

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Problems solved by technology

[0006] Aiming at the problem that complex high-precision, multi-degree-of-freedom adjustment mechanism is required in the existing aspheric surface splicing detection method, the present invention proposes an aspheric surface sub-aperture splicing measurement device based on a spherical air bearing shaft

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