Device and method for improving positioning precision of absolute position of precise machining equipment moving platform
A motion platform, absolute position technology, used in measuring devices, electrical devices, instruments, etc.
Active Publication Date: 2011-05-11
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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Problems solved by technology
[0004] This technology has ideal linearity and excellent resolution in the precise positioning of the absolute position of the motion platform, but it cannot avoid the impact of the "zero drift" problem on the positioning accuracy of the motion platform
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Embodiment Construction
[0083] Such as figure 1 As shown, a device for improving the absolute position positioning accuracy of the motion platform of precision machining equipment includes a motion platform 9 and a reference plate 8, and the first zero position in the same direction is fixed on the surface of the motion platform 9 close to the reference plate 8 The magnet group and the second zero magnet group, the magnetic poles of two adjacent zero magnets in the first zero magnet group and the second zero magnet group are oppositely arranged, and the reference plate 8 is close to the side of the moving platform 9 A first zero sensor 1 and a second zero sensor 2 are arranged on the surface corresponding to the positions of the first zero magnet group and the second zero magnet group respectively.
[0084]The actual high-precision machining equipment motion platform 9 often includes a number of degrees of freedom for x, y, z, rx, ry, rz (where rx, ry, and rz are the rotational degrees of freedom of ...
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A device and a method for improving positioning precision of absolute position of precise machining equipment moving platform are disclosed. The device includes a moving platform and a reference plate. A first zero magnet group and a second zero magnet group are fixed to a surface of the moving platform, which is close to one side of the reference plate. The magnetic poles of two adjacent zero magnets in the first zero magnetic group and the second zero magnet group are oppositely arranged. The positions, corresponding to the first zero magnet group and the second zero magnet group, on the surface of the reference plate which is close to one side of the moving platform, are respectively provided with a first zero sensor and a second zero sensor. Compared with the traditional method, the method disclosed by the invention can greatly compensate the zero shift problem caused by the elements aging, temperature fluctuation and outside stray factor besides obtaining ideal linearity and optimized resolution in the zero position.
Description
technical field [0001] The invention relates to a device and a method for improving the positioning accuracy of a motion platform of precision processing equipment, in particular to a device and a method for improving the absolute position positioning accuracy of a motion platform of precision processing equipment. Background technique [0002] In the field of motion control of high-precision processing equipment, high-precision detection equipment such as laser interferometers is usually used to ensure the control accuracy of the motion platform. However, such detection instruments cannot solve the problem of repeatability of the motion platform at the initial position. The so-called repeatability does not refer to the repeatability of the processing equipment when it moves, but refers to the repeatability of the equipment from an unknown state to a working state. For example, after cutting off the power supply of the equipment and re-powering it to resume use, it is necess...
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IPC IPC(8): G01B7/00
Inventor 陈磊韦雪芹连国栋
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD