300mm vertical oxidation furnace heat preservation barrel
A technology of oxidation furnace and heat preservation barrel, which is applied in electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve the problems of complex manufacturing process, production line loss, and high cost, and achieves simple manufacturing process, prevention of contamination of silicon wafers, and low cost. Effect
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[0010] Below in conjunction with accompanying drawing and embodiment the present invention will be further described: embodiment: referring to accompanying drawing, 300mm vertical oxidation furnace insulation barrel is provided with bottom quartz plate 1, middle quartz plate 2, support bar 3 and top quartz plate 4, There are 4 support rods, which are vertically fixedly installed between the bottom quartz plate and the top quartz plate, and there are 19 quartz plates, which are evenly fixed and installed on the support rods at transverse intervals; 3 fixed slots 4.1 for fixing the quartz boat. The bottom quartz plate and the top quartz plate are circular; the middle quartz plate is disc-shaped, and the structure of the middle quartz plate is an OP material layer 2.1 in the middle, and the upper and lower layers and the periphery are coated with high-purity transparent quartz plates Layer 2.2.
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