Gas bearing posture active control device

A gas bearing, active control technology, applied in the direction of bearings, shafts and bearings, mechanical equipment, etc., can solve the problems of difficult control of the straightness error of the worktable, high requirements for the manufacturing precision of the guide rail, and no error compensation link, and achieves the reduction of Straightness and flatness requirements, improving bearing capacity, and reducing the effect of straightness errors

Inactive Publication Date: 2009-10-21
HUAZHONG UNIV OF SCI & TECH
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AI Technical Summary

Problems solved by technology

[0004] In addition, the straightness error of the traditional precision workbench along the movement direction is mainly determined by the straightness and flatness of the air bearing guide rail, and there is no error compensation link. Therefore, the manufacturing accuracy of the guide rail is very high, and the cost is correspondingly high, and The straightness error of the table movement is difficult to control

Method used

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Embodiment Construction

[0015] The present invention will be further described below in conjunction with the accompanying drawings.

[0016] Such as figure 1 As shown, the structure of the device of the present invention is: gas bearings 5, 5' are installed relatively up and down, the upper bearing 5' is a follower bearing, the lower bearing 5 is an active bearing, and the two bearings are separated by a large rigidity compression spring 13 and pre-set. Tight, large pre-tightening force keeps the air film thickness of the active and follower bearings within a certain range, and the bearings have a large rigidity within this range. The two ends of the compression spring 13 are fixedly connected to the spheres of the spherical joints 6, 6', and the spheres of the spherical joints 6, 6' are installed in the ball sockets 14, 14' of the active bearing 5 and the follower bearing 5' respectively, and the two bearings Can rotate around the ball joint. Four cylinders 1, 2, 3, 4 are installed on the four cor...

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Abstract

The invention discloses a gas bearing posture active control device, which comprises a driven gas bearing and a driving gas bearing which are arranged up and down oppositely and are isolated and pre-tightened by a compression spring, wherein the two ends of the compression spring are connected with the two gas bearings through spherical joints respectively; and the four corners of the two gas bearings are all provided with cylinders up and down opposite in position, the cylinders are all made of a magnetic material, and the four cylinders on the driven gas bearing are all wound with wire coils. The device changes the size of an attractive force between each pair of cylinders by changing the size of the current in the coils so as to flexibly adjust the posture of the driving bearing to meet the requirements of different working conditions.

Description

technical field [0001] The invention belongs to gas bearing technology, in particular to a device for actively controlling the posture of a gas bearing. Background technique [0002] Because the gas fluid itself has the characteristics of low viscosity and compressibility, the gas bearing with gas as the lubricating medium has the characteristics of ① small friction loss, high speed and small temperature rise in high-speed motion; Crawling; ③The ability to withstand high temperature, low temperature and atomic radiation; ④No pollution, long life, simple structure, etc., so gas lubrication technology is widely used in the field of ultra-precision machining. In particular, most of the current ultra-precise positioning worktables (positioning accuracy reaches micron or even nanometer level) are based on air bearing technology and linear motor drive technology. [0003] However, the gas bearing has the disadvantages of small load, low rigidity, poor reliability, high manufactur...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16C32/00F16C32/04
Inventor 陈学东叶燚玺马波琪罗欣李小平曾理湛鲍秀兰房晓文冯二彬
Owner HUAZHONG UNIV OF SCI & TECH
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