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347results about How to "Reduce flatness requirements" patented technology

Manufacturing method of semiconductor device and substrate processing apparatus

According to the present invention, flatness of a thin film formed on a substrate is improved without generating particles and lowering productivity. A method of manufacturing a semiconductor device includes a first thin film layer forming step A and a second thin film layer forming step B. In the first thin film layer forming step A, on the way of heating and raising the temperature of the substrate up to a film-forming temperature, a film-forming source supply in which an organic source gas is made adhere onto the substrate in yet unreacted state is performed (202), and thereafter, a RPO process (Remote Plasma Oxidation) in which an oxygen radical is supplied onto the substrate to form a first thin film layer is performed (203). In this first thin film layer forming step A, it is preferable to repeat the film-forming source supply onto the substrate and the RPO process more than once. In the second thin film layer forming step B, after the source gas is supplied onto the substrate by a thermal CVD method to perform a film-forming process (205) after raising the temperature of the substrate to the film-forming temperature, the RPO process is performed to form a second thin film layer on the first thin film layer with a predetermined film thickness (206).
Owner:KOKUSA ELECTRIC CO LTD

Preparation method of graphene composite anticorrosive coating

The invention discloses a preparation method of a graphene composite anticorrosive coating. The preparation method comprises the following steps: (1) preparing an organic coating solution with a plurality of hydroxyls or amino groups; (2) preparing an oxidized graphene or modified graphene solution; (3) performing metal surface pretreatment; (4) performing electrodeposition to form an organic coating film; and (5) preparing the graphene composite anticorrosive coating. The method is simple and feasible in technology, the film forming speed is obviously improved, and the prepared coating is more compact and uniform; compared with a plain sample, the low-frequency impedance modulus value of the prepared composite coating is improved to 10<6.2> from 10<3.5> by performing electrochemical testing in 3.5wt% NaCl neutral electrolyte solution, the self-corrosion current is also remarkably reduced, and longer effective prevention effect on a matrix can be achieved. Compared with the conventional dip-coating method, the preparation method has lower requirement on the flatness of a metal surface, and controllable preparation can be effectively realized; the prepared coating is non-toxic and environment-friendly, controllable in thickness, and more compact and uniform, and more durable and stable protection effect on the metal matrix can be achieved.
Owner:OCEAN UNIV OF CHINA

Skid type AGV (automatic guided vehicle)

The invention relates to a skid type AGV (automatic guided vehicle). The skid type AGV comprises a main frame, double-belt wheel drive devices, a ground wheel drive device, direct-current servo motors, a storage battery, a PGV color recognition sensor and an obstacle recognition sensor, wherein the double-belt wheel drive devices are symmetrically arranged on the middle position of the main frame bilaterally; the two direct-current servo motors which are connected in the main frame are in transmission connection with the two double-belt wheel drive devices respectively; the ground wheel drive device comprises a left front wheel, a right front wheel, a left rear wheel and a right rear wheel, the left front wheel and the left rear wheel are in same-direction synchronous rotation, and the right front wheel and the right rear wheel are in synchronous same-direction rotation; a transmission structure of the AGV is realized by utilizing double synchronous belt wheels and a reduction supporting structure, so that the AGV has the mechanical type self-adaptive four-wheel-drive capacity. Furthermore, the color recognition sensor is applied to substitute a conventional magnetic navigation and RFID (radio frequency identification device) location mode with a color navigation and two-dimension code location mode, so that the navigation precision is improved, and the product cost and the using cost of the product are reduced.
Owner:邓莉莉

Raman amplifier

InactiveUS6882468B2Gain and gain flatness after expansion are not deteriorated considerablyReduce flatness requirementsLaser using scattering effectsLaser arrangementsMultiplexingAudio power amplifier
In a Raman amplifier using three or more pumping wavelengths, when the pumping wavelengths are divided into a short wavelength side group and a long wavelength side group at the boundary of the pumping wavelength having the longest interval between the adjacent wavelengths, the short wavelength side group includes two or more pumping wavelengths having intervals therebetween which are substantially equidistant, and the long wavelength side group is constituted by two or less pumping wavelengths. When a certain pumping wavelength is defined as a first channel and pumping wavelengths which are spaced apart from each other by about 1 THz from the certain pumping wavelength toward a long wavelength side are defined as second to n-th channels, respectively, pump lights having wavelengths corresponding to the first to n-th channels are multiplexed, and pump light having a wavelength spaced apart from the n-th channel by 2 THz or more toward the long wavelength side is further multiplexed with the said multiplexed pump light, and resultant pump light is used as pump source. Pump lights of all of the wavelengths corresponding to the channels other than (n−1)th and (n−2)th channels are multiplexed with each other, and resultant pump light is used as pump source. Pump lights of all of the wavelengths corresponding to the channels other than (n−2)th and (n−3)th channels are multiplexed with each other, and resultant pump light is used as pump source.
Owner:FURUKAWA ELECTRIC CO LTD

Clamp type sheet automatic-feeding device of hydraulic machine

The invention relates to a clamp type sheet automatic-feeding device of a hydraulic machine, which is characterized by comprising a mechanism supporting frame, a brake motor, a reducer and a clamp mechanism. The inner part of the mechanism supporting frame is fixedly provided with a linear guide rail which is provided with a base, and the base is provided with the brake motor, the reducer connected with the brake motor and the clamp mechanism. The inner part of the mechanism supporting frame is also fixedly provided with a rack which is engaged with a gear installed on one side of the reducer, and two end parts of the mechanism supporting frame are provided with limitation stops. The clamp type sheet automatic-feeding device has the advantages that a sheet to be machined is accurately sent to a preset position and is quickly positioned, so that the production efficiency is enhanced; the occupied space is small, the inner space of the hydraulic machine is saved, and the manufacturing cost of equipment is reduced; an automatic up and down system is convenient to realize automation, and the operation and the maintenance are easy; the sheet sending specification is expanded, the flatness demand to the sheet is reduced, and the production cost is reduced; the sheet run is smooth, and the noise is reduced; and the working environment is improved.
Owner:TIANJIN TIANDUAN PRESS CO LTD

Die taking and die bonding device and die bonding machine employing same

The invention discloses a die taking and die bonding device. A die bonding table moves along an X direction and a Y direction, a planar jig seat is embedded onto the die bonding table and is flush with the die bonding table, a heating device is connected with the planar jig seat, a rotation arm is provided with a welding head, the welding head is used for die taking and die bonding, a substrate is arranged above the die bonding table and does feeding motion relative to the die bonding table along the X direction, a first driving device is used for driving the rotation arm to do circumferential rotation, a wafer table is used for fixing a wafer, and a wafer table driving device is used for driving the wafer table to move along the X direction and the Y direction and driving the wafer table to rotate around a rotation shaft. The die taking and die bonding device has the beneficial effects that the planar jig seat is arranged, the substrate is heated within a certain range, the temperature is stably controlled, and a hole phenomenon is difficult to generate during chip assembly; and during die bonding, a force between the welding head and the substrate is concentrated on the planar jig seat, the requirement on integral smoothness of the die bonding table is greatly reduced, the parallelism of the welding head and the substrate arranged at a chip assembly position is improved, and the surface-mount smoothness of a semiconductor device is ensured.
Owner:SUZHOU ACCURACY ASSEMBLY AUTOMATION CO LTD

Anti-cracking color retention VOC-free (Volatile Organic Compounds) and zero-alkali-return aqueous dry powder building colored coating

The invention relates to an anti-cracking color retention VOC-free (Volatile Organic Compounds) zero-alkali-return aqueous dry powder building colored coating which comprises the following substances in percentage by weight: 20-40% of low-alkali cementing agent, 50-60% of colored sand, 4-9% of sepiolite powder, 0.01-0.015% of plasticizing agent, 0.05% of high-strength adhesive, 3-9% of redispersible latex powder, 0.01% of water repellent, 0-0.1% of antalkaline, 0.01-0.02% of powdered dispersing agent, 0-0.02% of powdered defoaming agent and 0.8-2% of inorganic pigment. The anti-cracking color retention VOC-free zero-alkali-return aqueous dry powder building colored coating is compounded by utilizing the compatibility principle of various powder raw materials and a scientific formula. The anti-cracking color retention VOC-free zero-alkali-return aqueous dry powder building colored coating has the advantages of strong base wall adhesive force, strong weather resistance, zero alkali return and bright color, no cracks or light pollution is generated, and the service life of the coating is as long as that of a building. The anti-cracking color retention VOC-free zero-alkali-return aqueous dry powder building colored coating is mainly applied to the decorative finish of civil building alternative brick surfaces and the latex coating decorative finish and belongs to a novel environment-friendly and energy-saving material.
Owner:湖南博通新型建材有限公司

Integrated assembly type pipe gallery based on composite bottom plate and construction method thereof

The invention discloses an integrated assembly type pipe gallery based on a composite bottom plate and a construction method thereof. Each unit plate block in the composite bottom plate of the integrated assembly type pipe gallery comprises a laminated portion and a cast-in-place portion which is located on the periphery of the laminated portion, wherein each laminated portion comprises a prefabricated bottom plate which is fixedly connected with a foundation cushion layer, a bottom plate truss and a bottom plate cast-in-place layer, and the peripheral edges of each bottom plate truss horizontally outwards extends to form a steel bar framework of the corresponding cast-in-place portion; a double-layer laminated wallboard comprises an outer prefabricated plate which is located on a water attaining face, an inner prefabricated plate which is located on a water opposite face and a cast-in-place sandwich layer which is located between the outer prefabricated plate and the inner prefabricated plate, the outer prefabricated plates and the inner prefabricated plates are connected through wall truss steel bars, and the bottoms of the wall truss steel bars are connected with the margins ofside edges of the steel bar frameworks of the cast-in-place portions of the composite bottom plate; and the lower end surface of the outer prefabricated plate is tightly attached to the upper surfaceof the foundation cushion layer, and a top plate cast-in-place layer of a laminated top plate and the cast-in-place sandwich layer of the double-layer laminated wallboard are integrally casted. According to the integrated assembly type pipe gallery and the construction method, the construction is convenient, fast and efficient, the construction cost is low, the waterproof effect is good, and the overall performance of the pipe gallery is high.
Owner:CHINA STATE CONSTRUCTION ENGINEERING CORPORATION +1

Composite heat insulation dimming glass and preparation method thereof

The invention provides composite heat insulation dimming glass and relates to the technical field of optoelectronic products. The composite heat insulation dimming glass comprises a first thin film substrate, a second thin film substrate, a first glass substrate and a second glass substrate, wherein the first thin film substrate and the second thin film substrate are arranged between the first glass substrate and the second glass substrate; a first transparent conducting layer is sputtered on the first thin film substrate, and a second transparent conducting layer is sputtered on the second thin film substrate; a PDLC (polymer dispersed liquid crystal) layer coats the first transparent conducting layer/the second transparent conducting layer; a first transparent adhesive layer coats the first thin film substrate/the first glass substrate, the first thin film substrate and the first glass substrate are fitted together by virtue of the first transparent adhesive layer, a second transparent adhesive layer coats the second thin film substrate/the second glass substrate, and the second thin film substrate and the second glass substrate are fitted together by virtue of the second transparent adhesive layer; and an ultraviolet absorber and an infrared blocking agent are added in the first transparent adhesive layer, and the infrared blocking agent is added in the second transparent adhesive layer.
Owner:HENGSHAN JIACHENG NEW MATERIAL

Ground-adaptive differential-drive floating wheel system

The invention provides a ground-adaptive differential-drive floating wheel system which comprises a front wheel set and a rear wheel set. The front wheel set comprises a front fork-shaped support, a horizontal floating rod is connected in the front fork-shaped frame through a pivot shaft, and universal wheels are respectively mounted under two ends of the horizontal floating rod; the rear wheel set is formed by two sets of longitudinal floating wheels perpendicular to the horizontal floating rod, each longitudinal floating wheel comprises a rear fork-shaped support and longitudinal floating rods arranged in the rear fork-shaped support, driving wheels are mounted at front ends of the longitudinal floating rods, universal wheels are mounted at rear ends of the longitudinal floating rods, inner sides of the longitudinal floating wheels are opposite, and the longitudinal floating wheels are connected in a manner that a horizontal shaft penetrates the rear fork-shaped supports and the longitudinal floating rods, the inner side of each longitudinal floating rod is provided with a drive motor, and the drive motors are connected with the driving wheels in a driving manner. The ground-adaptive differential-drive floating wheel system has the advantages of being simple and easy to use, convenient in disassembly and the like; the ground-adaptive differential-drive floating wheel system is simple in structure, low in cost, applicable to automatic guided vehicles of various operation conditions, not high in requirement of flatness of the ground and the like.
Owner:YUNNAN KSEC INTELLIGENT EQUIP
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