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Process and apparatus for producing carbonaceous film

A manufacturing method and carbonaceous film technology, applied in metal material coating process, coating, gaseous chemical plating, etc., can solve the problems of large-scale, increased equipment cost, unfavorable energy consumption, etc.

Inactive Publication Date: 2009-10-21
NAGOYA UNIVERSITY +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the laser grinding method generally requires the use of a high-power power supply of hundreds to thousands of W or more, which is disadvantageous in terms of energy consumption and the like.
In addition, the need for such a high-power power supply will lead to the complexity and size of the device, and the price of the laser generating device (laser signaler, etc.) is also high, so the equipment cost increases.

Method used

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  • Process and apparatus for producing carbonaceous film
  • Process and apparatus for producing carbonaceous film
  • Process and apparatus for producing carbonaceous film

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Embodiment Construction

[0047] Next, preferred embodiments of the present invention will be described. Among them, matters other than those specifically mentioned in this specification and necessary for the implementation of the present invention can be understood as matters designed by those skilled in the art based on the prior art in this field. The present invention can be implemented based on the content disclosed in this specification and common technical knowledge in the field.

[0048]In the technique disclosed here, as a raw material (which can be understood as a film forming material, a plasma source, a carbon source, etc.), an organic compound containing a carbon atom (C) (typically containing carbon (C) and other elements such as Hydrogen (organic compound of H)) is an organic material whose main component is solid as a whole. As the above-mentioned organic compound, an organic compound having a molecular weight (may be understood as an average molecular weight) of at least 100 and being...

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Abstract

This invention provides a process and apparatus for producing a carbonaceous film such as a DLC film using a solid raw material without the need to supply a high energy radiation such as a laser beam. The process comprises providing a solid organic material as a raw material, applying a discharge energy to the material to form plasma, and depositing the plasma onto a base material to form a carbonaceous film. This process is preferably carried out by using a film production apparatus (1) comprising discharge means (10). The discharge means (10) comprises a pair of electrodes (a raw material holder) (12, 14) for holding a raw material (50) and voltage applying means (20) for applying voltage across the electrodes.

Description

technical field [0001] The present invention relates to a method and apparatus for producing a carbonaceous film, and more specifically, to a method for producing a carbonaceous film including a step of forming plasma from a solid raw material using discharge energy and an apparatus used for the method. Background technique [0002] Diamond-Like Carbon (Diamond-Like Carbon, hereinafter sometimes referred to as "DLC") means that it contains the same SP as diamond 3 Binding and the same SP as graphite 2 The bonded carbon network structure is a general term for amorphous carbonaceous materials with a basic structure. This DLC is a high-performance material that can exhibit various excellent properties such as mechanical properties such as high hardness, wear resistance, low friction coefficient, and surface smoothness, chemical properties such as chemical resistance and corrosion resistance, and electrical properties such as insulation. And received much attention. In additi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/27C23C16/503C01B31/02C23C16/448
CPCC23C16/26C23C16/503C23C16/4485C01B32/05
Inventor 上坂裕之小泉宏之滨岛绘里梅原德次荒川义博
Owner NAGOYA UNIVERSITY
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