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Air floatation conveyance device and method of conveyance using air

A technology of conveying device and conveying direction, which is applied in the direction of transportation and packaging, conveyors, conveyor objects, etc., to achieve the effects of increasing air pressure, reducing manufacturing costs, and suppressing escape

Inactive Publication Date: 2009-11-04
SINFONIA TECHNOLOGY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0013] The above-mentioned prior art prevents the front end (downstream side end) of the object to be transported from drooping after passing through the downstream side end of the air lift unit in the transport direction to interfere with the air lift unit in front of it.

Method used

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  • Air floatation conveyance device and method of conveyance using air
  • Air floatation conveyance device and method of conveyance using air
  • Air floatation conveyance device and method of conveyance using air

Examples

Experimental program
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Effect test

no. 1 example

[0094] Fig. 1 is a diagram showing a structural example of the first embodiment of the air lift transportation device of the present invention.

[0095] Figure 1A It is a figure which shows the example of the air lift unit 1 which becomes a constituent unit of the air lift conveyance apparatus of this invention.

[0096] Such as Figure 1A As shown, the air lift unit 1 is provided with a pair of air supply pipes 11 , 12 on both sides of the back panel 13 . Compressed air is supplied to the air supply pipes 11 and 12 .

[0097] The air supply pipes 11 and 12 are provided with oblique nozzles 21 , and are configured to eject air obliquely upward from the rear panel 13 as indicated by arrows.

[0098] And if Figure 1B As shown, air is jetted obliquely upward from the rear plate 13 from the inclined nozzle 21 to form an air pool between the planar substrate 10 to be transported and the back plate 13 , and the planar substrate 10 is lifted from the back plate 13 .

[0099] ...

no. 2 example

[0102] Figure 2 and image 3 It is a figure which shows the structure example of the 2nd embodiment of the air lift transportation apparatus of this invention.

[0103] Figure 2A It is a figure which shows the structural example of the air lift unit 2 in 2nd Example of an air lift conveyance apparatus.

[0104] Figure 2A The air lift unit 2 shown is in Figure 1A In the shown air lift unit 1 , an air supply pipe 31 is added to the front side of the back plate 13 (downstream side in the transport direction of the flat substrate). The air supply pipe 31 is provided with an inclined nozzle 32, such as Figure 2B As shown, when the rigidity of the planar substrate 10 is small and a drooping portion 10a is generated at the front end of the planar substrate 10, the drooping portion 10a at the front end of the planar substrate 10 is lifted upward by jetting air from the inclined nozzle 32 obliquely above the rear plate 13. stand up.

[0105] Thus, if Figure 2C As shown, whe...

no. 3 example

[0109] Figure 4 and Figure 5 It is a figure which shows the structure example of the 3rd embodiment of the air lift transportation apparatus of this invention.

[0110] Figure 4A It is a figure which shows the structural example of the air lift unit 2 in the air lift conveyance apparatus 3rd Example.

[0111] Figure 4A The air lift unit 2 shown is in Figure 1A Air supply pipes 31 and 31-1 are added to the front side and rear side (downstream side and upstream side in the transport direction of the flat substrate) of the rear panel 13 of the air lift unit 1 shown. The air supply pipes 31 and 31-1 are provided with inclined nozzles 32 and 32-1, as Figure 4B As shown, when the rigidity of the planar substrate 10 is small and a drooping portion 10a occurs at the front end of the planar substrate 10, the drooping portion 10a at the front end of the planar substrate 10 is lifted upward by jetting air from the inclined nozzle 32-1 obliquely above the rear plate 13. Fang lif...

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Abstract

Rows of air floatation units (1) form a conveying route for planar substrates (10), and the rows are arranged in lines in the direction of conveyance of the planar substrates so as to be in parallel to each other. Each floatation unit (1) is constructed from a rear plate (13) forming a conveying route for planar substrates (10) and from a pair of air supply pipes (11, 12) located on both sides of and in parallel to the conveying route and having inclined nozzles (21) for jetting air to above the center of the rear plate (13). The air floatation unit can be flexibly formed according to the size and weight of planar substrates such as liquid crystal substrates, and the planar substrates can be stably conveyed.

Description

technical field [0001] The present invention relates to a transport device for flat substrates such as semiconductor substrates and liquid crystal substrates, and more particularly to an air lift transport device and an air transport method for stably transporting flat substrates such as semiconductor substrates and liquid crystal substrates by air. [0002] The present invention claims the priority of Japanese Patent Application No. 2006-315498 filed with the Japan Patent Office on November 22, 2006 and Japanese Patent Application No. 2007-210201 filed with the Japan Patent Office on August 10, 2007, the contents of which are incorporated herein. Background technique [0003] In general, various proposals have been made for devices for transporting flat panels while being lifted by air. For example there are Figure 6A and Figure 6B The float shown (see Non-Patent Document 1). Figure 8A A conceptual diagram representing a float, Figure 8B Shows the cross-sectional vie...

Claims

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Application Information

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IPC IPC(8): B65G49/06B65G51/03H01L21/677
Inventor 北泽保良须田佳雅
Owner SINFONIA TECHNOLOGY CO LTD
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