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Film plating device

A technology of a coating device and a coating umbrella, which is applied in sputtering coating, ion implantation coating, vacuum evaporation coating and other directions, can solve the problems of reducing coating precision, tilting of coating umbrella frame, difficult to adjust the horizontal position, etc. Accuracy, effect of avoiding differences in coating thickness

Inactive Publication Date: 2009-12-16
HONG FU JIN PRECISION IND (SHENZHEN) CO LTD +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, due to the difference in human operation, the coating umbrella stand will be tilted when tightening the studs and other connecting parts, and it is difficult to adjust it to a horizontal position, so that in the coating process, the coating thickness on the surface of the workpiece to be coated will have a large difference. Reduced coating accuracy

Method used

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Embodiment Construction

[0013] The embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0014] Please also refer to Figure 1 to Figure 3 , a coating device 100 provided in the first embodiment of the present invention. The coating device 100 includes a coating umbrella frame 10 , a bracket 20 , four connecting pieces 30 , four elastic elements 40 , and a detection device 50 .

[0015] The coated umbrella stand 10 is made of metal with good thermal conductivity, and its material can be metal such as copper, aluminum or stainless steel. The coating umbrella stand 10 is provided with a plurality of accommodating through holes 102 for accommodating workpieces to be coated (not shown). Twelve first through holes 106 are opened at the bottom of the coated umbrella stand 10 . Wherein, every two first through holes 106 are arranged oppositely and located on the same horizontal line. Preferably, the line connecting every two first...

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Abstract

The invention provides a film plating device comprising a film plating umbrella stand, a plurality of connecting pieces, a support and a detecting device. The film plating umbrella stand is used for supporting a workpiece to the plated; each connecting piece is provided with a first end part and a second end part which is opposite to the first end part, wherein, the first end part is connected to the top of the film plating umbrella stand, and the second end part is provided with external threads; the support is provided with thread holes, and the second end parts of the connecting pieces are screwed in the thread holes so as to hang the film plating umbrella stand; and the detecting device is used for detecting if the film plating umbrella stand is kept horizontal when the connecting pieces are screwed in and out of the support. Compared with the prior art, the film plating device adopts the detecting device to detect if the film plating umbrella stand is kept horizontal and adopts the connecting pieces to adjust the film plating umbrella stand to the horizontal position, thereby avoiding the difference of the thickness of the film plated on the surface of the workpiece, which is caused by the inclination of the film plating umbrella stand in the film plating process.

Description

technical field [0001] The invention relates to the field of coating process, in particular to a coating device. Background technique [0002] At present, the surface of many industrial products is coated with functional films to improve various properties of the product surface. For example, an anti-reflection film is coated on the surface of the optical lens to reduce the reflectivity of the surface of the lens and reduce the energy loss of the incident light passing through the lens. Another example is that a layer of filter film is coated on the surface of some filter elements, which can filter out light of a certain predetermined band and make various filters. Generally, coating methods mainly include ion coating method, radio frequency magnetron sputtering, vacuum evaporation method, chemical vapor deposition method and the like. Ichiki, M. et al. published in the paper Thin film formation-a fabrication on non-planar surface by spray coating method in 2003 Symposium ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/22C23C14/50
CPCC23C14/50C23C14/547
Inventor 简士哲
Owner HONG FU JIN PRECISION IND (SHENZHEN) CO LTD
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