Electron beam deflection device of computer controlled coating machine and control method thereof

A technology of electron beam and coating machine, which is applied in the direction of sputtering coating, vacuum evaporation coating, ion implantation coating, etc., which can solve the problem that it is difficult to achieve smooth surface of evaporation material, accuracy and stability cannot be guaranteed, and evaporation rate is difficult Control and other problems, to achieve a good man-machine exchange interface, eliminate stability problems, and easy to operate

Inactive Publication Date: 2010-01-06
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

[0005] The electron beam deflection of the traditional electron beam coating machine mainly relies on the operator to adjust the mechanical potentiometer to change the voltage at both ends of the deflection coil. The accuracy and stability of the operation cannot be guaranteed, and it is difficult to achieve a smooth surface of the evaporated material, resulting in an unstable evaporation cloud. , not easy to control the evaporation rate

Method used

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  • Electron beam deflection device of computer controlled coating machine and control method thereof
  • Electron beam deflection device of computer controlled coating machine and control method thereof

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Embodiment Construction

[0040] The present invention will be further described below in conjunction with the embodiments and accompanying drawings.

[0041] see first figure 1 and figure 2 , figure 1 It is a structural block diagram of the computer-controlled electron beam deflection device of the coating machine of the present invention, figure 2 Yes figure 1 A side view of the mutual positional relationship between the electron beam emission source, the circular crucible, the X-direction deflection coil and the Y-direction deflection coil. As can be seen from the figure, the computer controls the electron beam deflection device of the coating machine of the present invention, and the described coating machine has an electron beam emission source 4 and a circular crucible 3 positioned above the electron beam emission source 4, and two pairs of the circular crucible 3 There are X-direction deflection coils 1 and Y-direction deflection coils 2 perpendicular to each other outside the side, and th...

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Abstract

The invention relates to an electron beam deflection device of a computer controlled coating machine and a control method thereof. The electron beam deflection device of the computer controlled coating machine comprises a scanning control instrument, a manual remote controller, a data collecting card and a computer. The invention has high control precision and reliability on electron beam deflection and widespread adaptability on different electron gun equipment. After carrying out the processes of data collection and data processing once, each kind of electron gun equipment can be automatically run and controlled by the computer by adjusting control data by a user.

Description

technical field [0001] The invention relates to optical coating, in particular to a computer-controlled device and control method for electron beam deflection of a coating machine. Background technique [0002] In the process of preparing optical thin films by electron beam thermal evaporation, it is required to maintain a certain evaporation rate and stable evaporation characteristics to ensure the quality of the prepared thin films. The stable evaporation rate and evaporation characteristics are directly related to the beam spot on the coating material after the deflection of the electron beam. The shape and energy of the beam spot directly affect the evaporation rate of the coating material; the position of the beam spot on the surface of the coating material, It directly affects the spatial distribution of the coating material in the entire coating chamber after being heated and evaporated, that is, the shape of the evaporation cloud. [0003] In order to obtain a more ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/30C23C14/54
Inventor 王宁易葵郭世海
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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