Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Triaxial acceleration sensor

An acceleration sensor, axis technology, applied in the measurement of acceleration, multi-dimensional acceleration measurement, speed/acceleration/shock measurement, etc., can solve problems such as high space requirements, and achieve the effect of suppressing zero-point deviation and compact structure

Inactive Publication Date: 2010-02-03
ROBERT BOSCH GMBH
View PDF0 Cites 13 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This results in high space requirements and relatively large acceleration sensors

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Triaxial acceleration sensor
  • Triaxial acceleration sensor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0016] figure 1 A schematic diagram of a first embodiment of an acceleration sensor 300 is shown, which is arranged on the z-axis above the surface of a substrate 322 lying in the x-y plane. The acceleration sensor 300 is suitable for detecting accelerations in all three spatial directions x, y, z. Acceleration sensor 300 is made of, for example, a silicon substrate as a micromechanical component.

[0017] The acceleration sensor 300 includes an outer frame 313 arranged in an x-y plane. The outer frame 313 has a rectangular basic shape. The outer edge of the outer frame 313 is composed of a first frame part 316 , a second frame part 317 , a third frame part 318 and a fourth frame part 319 . The first frame member 316 and the third frame member 318 are oriented parallel to the y-axis. The second frame part 317 and the fourth frame part 319 are oriented parallel to the x-axis. The area enclosed by the first frame member 316, the second frame member 317, the third frame memb...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The present invention relates to an acceleration sensor, especially to a triaxial acceleration sensor, which includes a substrate and a first mass element, which is connected to the substrate in sucha way that the first mass element is rotatable about an axis, the first mass element being connected to a second mass element in such a way that the second mass element is movable along a first direction parallel to the axis, and the first mass element being connected to a third mass element in such a way that the third mass element is movable along a second direction perpendicular to the axis.

Description

technical field [0001] The invention relates to an acceleration sensor with a mass arranged above a base plane. Background technique [0002] For applications in entertainment and automotive electronics, a three-axis acceleration sensor, especially a micromechanical three-axis acceleration sensor is desired. Here, it is desirable for the acceleration sensor to have a construction that is as compact as possible. [0003] The basic principle of a micromechanical acceleration sensor is that a seismic mass is mounted on a substrate movably relative to a fixed electrode by means of a suspension. The vibrating mass and the stationary electrodes form one or more capacitors. The displacement of the seismic mass caused by the acceleration acting on the micromechanical acceleration sensor results in a change in the capacitance of these capacitors, which can be detected and used as a measure for the magnitude of the acting acceleration. In order to avoid zero point deviations, the c...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/18B81B7/02
CPCG01P2015/0814G01P15/18G01P15/125G01P2015/0831
Inventor J·克拉森L·特夫耶
Owner ROBERT BOSCH GMBH
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com