Neutralization apparatus, ion balance adjustment circuit, and ion balance adjustment electrode

Abstract

A neutralization apparatus comprises a discharge electrode generating positive or negative ions depending on the polarity of a DC high voltage being applied, a high voltage generation circuit for applying a DC high voltage to the discharge electrode, and a grounded guard electrode which shuts out a forward space for delivering the ions with an appropriate profile. The discharge electrode is constituted of 2n (n is a natural number) discharge needles divided into two groups of n discharge needles. The high voltage generation circuit applies high voltages of reverse polarity to two groups of discharge needles, respectively, and reverses the polarity every predetermined period. The neutralization apparatus is compact and lightweight and exhibits excellent attenuation time characteristics andion balance characteristics.

Description

technical field [0001] The invention relates to a static elimination device which irradiates positive and negative ions to a charged object to make it electrically neutral, and an ion balance adjustment circuit and an ion balance adjustment electrode used in the static elimination device. Background technique [0002] Conventionally, in semiconductor production lines and battery (cell) production processes such as mobile phones, etc., in order to prevent electrostatic failure or electrostatic adsorption caused by electrification of parts, static eliminators are installed near work tables, conveyor belts, etc. [0003] In this kind of static elimination device used at the manufacturing site, it has the function of releasing (irradiating) positive or negative ions to the target object (component) of positive or negative charge in whole or in part, and in a state of uneven charge, to perform electrical neutralization. de-static device. [0004] Such static eliminators are clas...

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Problems solved by technology

That is, it cannot be applied to a static elimination method that is difficult to change the output voltage when changing the high voltage applied to the discharge needle.

[0042] In addition, in the case of a method of changing the voltage applied to the adjustment electrode, a new power supply for the adjustment electrode is required separately, which increases the cost and increases the external dimensions.

[0043] In addition, the ion balance adjustment electrode described in the above-mentioned Patent Document 3 has a mechanically driven part, so there are problems such as lack of reliability and complicated shape.

[0044] As mentioned above, in the existing static eliminators, the problems of size or weight, decay time characteristics, and ion balance characteristics have not been realized so far. Static elimination device that solves all these problems

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