Resonance miniature electric field sensor
An electric field sensor and sensor technology, applied in electrostatic field measurement, television, piezoelectric/electrostrictive/magnetostrictive devices, etc., can solve the problems of large excitation voltage, low signal-to-noise ratio, low quality factor, etc., and achieve improved Sensitivity and accuracy, reducing electrostatic excitation voltage, and enhancing the effect of environmental anti-interference ability
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[0018] The present invention will be described in detail below in conjunction with the accompanying drawings.
[0019] Figure 1a It is a structural schematic diagram of a resonant miniature electric field sensor based on SOI technology according to the present invention, the sensor mainly includes a sensor sensitive structure, a closed-loop feedback control circuit part 2 and a signal detection circuit part 3, etc., wherein the sensor sensitive structure mainly includes It consists of a substrate 1, an excitation electrode 4, a vibration sensitive electrode 5, a shielding electrode 6, an electric field induction electrode 7, a support beam 8, and a plurality of anchor points 9. The excitation electrode 4 with a comb-tooth structure is fixed on one side of the substrate 1 by an anchor point 9; the vibration-sensitive electrode 5 with a comb-tooth structure is fixed on the other side of the substrate 1 by an anchor point 9; the shield electrode 6 and the electric field induction...
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