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Resonance miniature electric field sensor

An electric field sensor and sensor technology, applied in electrostatic field measurement, television, piezoelectric/electrostrictive/magnetostrictive devices, etc., can solve the problems of large excitation voltage, low signal-to-noise ratio, low quality factor, etc., and achieve improved Sensitivity and accuracy, reducing electrostatic excitation voltage, and enhancing the effect of environmental anti-interference ability

Active Publication Date: 2012-06-27
INST OF ELECTRONICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The sensitive structure of the device is prepared by polysilicon technology, which mainly includes comb-tooth excitation structure, comb-tooth capacitance pickup structure, shielding electrode, sensing electrode and support beam. High sensitivity and precision can be obtained, but there is still a certain distance from the actual application requirements. In addition, the excitation voltage is large, and device adhesion is prone to occur, and the quality factor is not high and the signal-to-noise ratio is low.

Method used

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Embodiment Construction

[0018] The present invention will be described in detail below in conjunction with the accompanying drawings.

[0019] Figure 1a It is a structural schematic diagram of a resonant miniature electric field sensor based on SOI technology according to the present invention, the sensor mainly includes a sensor sensitive structure, a closed-loop feedback control circuit part 2 and a signal detection circuit part 3, etc., wherein the sensor sensitive structure mainly includes It consists of a substrate 1, an excitation electrode 4, a vibration sensitive electrode 5, a shielding electrode 6, an electric field induction electrode 7, a support beam 8, and a plurality of anchor points 9. The excitation electrode 4 with a comb-tooth structure is fixed on one side of the substrate 1 by an anchor point 9; the vibration-sensitive electrode 5 with a comb-tooth structure is fixed on the other side of the substrate 1 by an anchor point 9; the shield electrode 6 and the electric field induction...

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Abstract

The invention relates to a resonance miniature electric field sensor. The sensor comprises a substrate, an exciting electrode with a comb structure, a vibration sensitive electrode with a comb structure, a shielding electrode, an electric field inductive electrode, a crossbeam and a supporting beam, wherein the exciting electrode with the comb structure is fixed on one side of the substrate by ananchor point, while the vibration sensitive electrode with the comb structure is fixed on the other side of the substrate by an anchor point; the shielding electrode and the electric field inductive electrode are fixed on the area of the substrate in the middle of the exciting electrode and the vibration sensitive electrode; the shielding electrode and the electric field inductive electrode are alternately arranged; the crossbeam is positioned in the middle of the shielding electrode; one end of the supporting beam is fixed on the substrate by the anchor point, while the other end is connected with the exciting electrode and the vibration sensitive electrode. The resonance miniature electric field sensor can reduce the static exciting voltage of a device, improve the sensitivity and precision of the sensor, and further improve the environment interference resistance capability of the sensor.

Description

technical field [0001] The invention relates to an electric field sensor, in particular to a resonant miniature electric field sensor based on silicon-on-insulator (SOI) technology. Background technique [0002] The electric field sensor is a device for measuring electric field strength. It is widely used in many fields such as national defense, aerospace, weather detection, electric power, earthquake prediction, scientific research and industrial production, and plays a very important role. For example, with the help of electric field sensors to monitor changes in the ground and air atmospheric electric fields, accurate meteorological information can be obtained, thereby providing security for the launch of missiles, satellites and other aircraft into the sky; in the field of industrial production, using electrostatic field sensors to monitor The potential distribution and electric field distribution help us to take effective measures to prevent accidents in time; and by me...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R29/12B81B7/02
Inventor 彭春荣夏善红
Owner INST OF ELECTRONICS CHINESE ACAD OF SCI
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