Resonance miniature electric field sensor

Abstract

The invention relates to a resonance miniature electric field sensor. The sensor comprises a substrate, an exciting electrode with a comb structure, a vibration sensitive electrode with a comb structure, a shielding electrode, an electric field inductive electrode, a crossbeam and a supporting beam, wherein the exciting electrode with the comb structure is fixed on one side of the substrate by ananchor point, while the vibration sensitive electrode with the comb structure is fixed on the other side of the substrate by an anchor point; the shielding electrode and the electric field inductive electrode are fixed on the area of the substrate in the middle of the exciting electrode and the vibration sensitive electrode; the shielding electrode and the electric field inductive electrode are alternately arranged; the crossbeam is positioned in the middle of the shielding electrode; one end of the supporting beam is fixed on the substrate by the anchor point, while the other end is connectedwith the exciting electrode and the vibration sensitive electrode. The resonance miniature electric field sensor can reduce the static exciting voltage of a device, improve the sensitivity and precision of the sensor, and further improve the environment interference resistance capability of the sensor.

Description

Technical field [0001] The invention relates to an electric field sensor, in particular to a resonant miniature electric field sensor based on silicon-on-insulator (SOI) technology. Background technique [0002] Electric field sensor is a device for measuring the intensity of electric field. It is widely used in many fields such as national defense, aerospace, meteorological detection, electric power, earthquake prediction, scientific research, and industrial production. It has a very important role. For example, with the help of electric field sensors to monitor changes in the atmospheric electric field on the ground and in the air, accurate meteorological information can be obtained, thereby providing safety guarantees for missiles, satellites and other aircraft launching and launching; in the field of industrial production, electrostatic field sensors are used to monitor industrial environments. The distribution of electric potential and electric field helps us to take effecti...

AI Technical Summary

Problems solved by technology

The sensitive structure of the device is prepared by polysilicon technology, which mainly includes comb-tooth excitation structure, comb-tooth capacitance pickup structure, shielding electrode, sensing electrode and support beam. High sensitivity and precision can be obtained, but there is still a certain distance from the actual application requirements. In addition, the excitation voltage is large, and device adhesion is prone to occur, and the quality factor is not high and the signal-to-noise ratio is low.

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