Turning device

Abstract

The invention discloses a turning device, which comprises a turning drive part, a bearing element, a clamping element and a control device. The clamping element is arranged on the bearing element, the turning drive part is connected with the bearing element and is electrically connected with the control device, the control device controls the turning drive part, the turning drive part drives the bearing element to turn, an object to be turned is clamped on the bearing element by the clamping element, the turning device also comprises a cavity with a hollow structure, the hollow structure of the cavity forms a turning cavity, the bearing element is accommodated in the turning cavity, the bearing element has a hollow structure, the hollow structure of the bearing element forms a bearing cavity, the clamping element is arranged in the bearing cavity, the bearing element is provided with an entrance communicated with the bearing cavity, the cavity is provided with an inlet communicated with the turning cavity, and the entrance and the inlet are opposite and are positioned on the same height. The invention aims to provide the turning device which has a simple and compact structure, is convenient and fast to mount and adjust, has relatively low pollution to a substrate and can accurately turn in 360 degrees.

Description

technical field [0001] The invention relates to a device for reversing a finished product or a semi-finished product, in particular to a device for reversing a substrate or a substrate in a semiconductor device. Background technique [0002] With the development of semiconductor manufacturing equipment and technology, more and more occasions need to flip the substrate, the usual substrate processing (such as cleaning, polishing), only one side of the substrate can be processed each time, at this time Just need a kind of turnover device of substrate to turn over substrate. [0003] At present, in the semiconductor manufacturing process, the flipping of the substrate is already a crucial process. Whether the design of the substrate turning device is reasonable and reliable will directly affect the subsequent reprocessing of the substrate. Processing and positioning accuracy; the turning speed is slow, which will lead to a series of problems such as prolonging the production ...

AI Technical Summary

Problems solved by technology

[0016] Although using the substrate cassette to flip the substrate can maintain a good micro-local environmental cleanliness, there are also problems such as many processes, large space occupation, complex structure, and high overall equipment cost.

And when the size of the substrate is larger, the substrate cassette will also increase accordingly, and the corresponding turning control process will be quite complicated.

[0017] 3. Turn over the substrate or the substrate box directly through the manipulator. This kind of manipulator operation has certain difficulties in controlling the rotation angle and speed.

[0018] The existing technology is more or less unsatisfactory. More processes and some redundant designs have caused a series of problems, such as vacuum pollution, or taking up a large space, and inconvenient installation, operation, and maintenance, etc.

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