Environmental humidity control method and device for sealed cavity
A technology of environmental humidity and control method, applied in the direction of humidity control, non-electric variable control, control/regulation system, etc., can solve the problem of not being able to accurately control the humidity, etc., achieve fast humidity regulation speed, wide regulation humidity range, and use handy effect
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[0011] The present invention is described in further detail below with the mode of embodiment:
[0012] The gas is divided into two branches of drying and humidification and enters the air chamber of the airtight cavity. Use high-pressure gas cylinders or gas compressors to adjust the required test gas to the specified pressure to ensure that the pressure of the gas source is stable, thereby providing a basic guarantee for accurate humidity control. Among them, the dry gas branch passes concentrated H 2 SO 4 After drying, it is regulated by the gas flow meter and then connected to the three-way gas joint; the humidified gas branch is humidified through the water tank and then connected to the three-way gas joint after being regulated by the flow meter. Cavity environment air chamber. The humidity control in the air chamber of the airtight chamber ring chamber is adjusted by adjusting the flow rate ratio of dry and wet gas through two flowmeters. Gas source components can b...
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