Cathode insulating block for realizing three-face positioning of filament clip

Abstract

The invention discloses a cathode insulating block for realizing the three-face positioning of a filament clip. The cathode insulating block is provided with four positioning ribs, wherein two positioning ribs are positioned in the middle of the cathode insulating block, and the other two positioning ribs are respectively positioned on the left and right sides of the cathode insulating block. In the invention, a positioning rib is respectively added to the two sides, of the cathode insulating block, for arranging the filament clip so as to ensure that the filament clip has three positioning surfaces and that the filament clip can be positioned on the cathode insulating block firmly without filament displacement caused by bad positioning during arrangement, a friction force when a retaining screw rotates or the collision of an external force; and the short circuit of a filament and a cathode can be avoided.

Description

technical field [0001] The invention relates to a component related to semiconductor production equipment, in particular to a cathode insulating block for realizing three-side positioning of a filament clamp. Background technique [0002] Ion implanters came out in the 1960s due to the need for doping of semiconductor materials. Although there are some different types, they generally consist of the following main parts: (1) the ion source, which is used to generate and extract the ion beam of a certain element, which is the source of the ion implanter; (2) the accelerator, Accelerate the ion beam drawn from the ion source to achieve the required energy; (3) mass analysis of the ion beam (selection of ion species); (4) constraint and control of the ion beam; (5) target chamber; ( 6) Vacuum system. [0003] The cathode assembly of the ELS type ion source of the GSD ion implanter is as follows: figure 1 and figure 2 As shown, it consists of filament 3, filament clamp 4, ca...

AI Technical Summary

Problems solved by technology

[0004] The technical problem to be solved by the present invention is to provide a cathode insulating block that realizes three-sided positioning of the filament clamp, which overcomes the disadvantages that it is difficult to position the filament clamp on the cathode insulating block when the filament clamp is installed, and the filament clamp is prone to shift, resulting in a short circuit between the filament and the cathode

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