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Low temperature frequency curve testing device for quartz wafer

A technology of frequency-temperature curve and quartz wafer, which is applied in the field of low-temperature frequency-temperature curve test device, can solve the problem of no research on the frequency-temperature test of quartz wafer, and achieve the effect of high-precision testing of wafer performance

Inactive Publication Date: 2014-09-03
BEIJING INST OF SPACECRAFT ENVIRONMENT ENG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, domestic manufacturers of quartz wafers only have a test method for testing high-temperature frequency-temperature characteristics, and have not studied the frequency-temperature testing of quartz wafers at low temperatures.

Method used

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  • Low temperature frequency curve testing device for quartz wafer
  • Low temperature frequency curve testing device for quartz wafer

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Experimental program
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Embodiment Construction

[0012] The present invention will be described in detail below in conjunction with the accompanying drawings.

[0013] The low-temperature frequency-temperature curve test device for quartz wafer is composed of a wafer test device, platinum resistors, circuit components, frequency measurement system and cables. Since the data acquisition of frequency-temperature characteristics is universal, only the chip test device will be described in detail here, and will not be repeated here. A further description of the acquisition and measurement system is given.

[0014] figure 1 It is a schematic diagram of a wafer testing device, which includes a wafer mounting plate 1 , a temperature control flange 2 , a heating plate 3 and a temperature control cover plate 7 .

[0015] The wafer mounting plate 1 has a circular bottom plate, and the center of the circular bottom plate has a device opening 6, and a circular protective step 14 is upwardly formed at a certain distance from the edge of...

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Abstract

The invention relates to a low temperature frequency curve testing device for a quartz wafer, which consists of a wafer testing device, a platinum resistor, a circuit component, a frequency measuring system and a cable. The wafer testing device comprises a wafer mounting plate (1), a temperature-controlled flange (2), a heating sheet (3) and a temperature-controlled cover plate (7). The wafer mounting plate (1) is wholly in an inverted pi shape. The lug boss type temperature-controlled flange (2) is fastened on the wafer mounting plate (1) to form a space for accommodating the tested wafer. The circular heating sheet (3) is arranged on the temperature-controlled flange (2). The circular temperature-controlled cover plate (7) is arranged on the heating sheet (3). A plurality of mounting holes (1) for a cold shield are uniformly distributed on a circular bottom plate outside the lug boss, and an outer ring of the temperature-controlled flange (2) can be contacted and fixed with the cold shield through bolts. The low temperature frequency curve testing device for the quartz wafer fills domestic gap, adopts the mode of reducing the temperature by using the cold shield and raising the temperature by using the heating sheet, and can precisely test the performance of the wafer.

Description

technical field [0001] The invention relates to a testing device for a quartz crystal microbalance used in the aerospace field, in particular to a low-temperature frequency-temperature curve testing device for a quartz wafer in the balance. Background technique [0002] The key component in the quartz crystal microbalance is the quartz wafer, which determines the measurement accuracy, measurement stability and reliability of the quartz crystal microbalance. The design, development and screening of wafers are the key tasks to ensure that the development of quartz crystal microbalances meets the technical requirements. At present, domestic manufacturers of quartz wafers only have testing methods for testing high-temperature frequency-temperature characteristics, and have not studied the frequency-temperature testing of quartz wafers under low-temperature conditions. Contents of the invention [0003] The purpose of the present invention is to provide a frequency temperature...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N33/00G01K7/18
Inventor 臧卫国易忠杨东升于钱
Owner BEIJING INST OF SPACECRAFT ENVIRONMENT ENG
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