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Method for manufacturing two-part type solar cell

A technology of solar cells and manufacturing methods, applied in the direction of final product manufacturing, sustainable manufacturing/processing, circuits, etc., can solve problems such as increased cost and complexity

Inactive Publication Date: 2010-07-07
HEJIAN TECH SUZHOU
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] The disadvantage of this two-stage solar cell manufacturing method is that at least a second mask thermal diffusion process is required, which is not only complicated but also increases the cost

Method used

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  • Method for manufacturing two-part type solar cell
  • Method for manufacturing two-part type solar cell
  • Method for manufacturing two-part type solar cell

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Embodiment Construction

[0038] The present invention will be further described below according to the accompanying drawings.

[0039] The present invention proposes a two-stage solar cell manufacturing method, and its first preferred embodiment includes:

[0040] Step 1, manufacturing the substrate;

[0041] Step 2. Diffusion after impurity implantation; or impurity implantation after diffusion; the impurity implantation step includes: setting a barrier on the substrate, the barrier has a preset pattern opening, and the opening penetrating through the barrier; implanting impurities under the barrier to form a high-concentration impurity layer. Combining impurity implantation and diffusion, the impurity concentration at the opening is higher than the impurity concentration at the non-opening;

[0042] Step 3, forming an anti-reflection film on the surface and forming electrodes.

[0043] The above-mentioned embodiments of the present invention can manufacture solar cells with one-time implantation ...

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Abstract

The invention provides a method for manufacturing a two-part type solar cell, comprising the following steps of: manufacturing a substrate; implanting impurity before diffusing; or diffusing before implanting impurity. The step of implanting purity comprises the steps of: setting an obstruction on the substrate, wherein the obstruction is provided with a preset pattern opening for perforating the obstruction; implanting purity below the obstruction and enabling the concentration of the purity at the opening to be higher than that of the purity at the non-opening; and forming a reflective protection film as well as electrode on the surface. The invention ensures that doped ion with different concentrations can be implanted in different areas by adopting the obstruction so that a high-concentration layer is formed below the electrode and a low-concentration layer is formed in other areas. The method provided in the method can adopt implantation and diffusion in one step to realize the technical parameter the same as the two-part type solar cell, has better contact resistance as well as higher conversion efficiency, reduces the production process and lowers the cost.

Description

technical field [0001] The invention relates to a method for manufacturing a solar cell, in particular to a method for manufacturing a two-stage solar cell. Background technique [0002] With the development of human science and technology, human society is increasingly dependent on energy. Energy sources such as coal and oil are non-renewable, so modern science and technology pay more and more attention to solar energy, a clean, efficient and renewable energy source. [0003] Solar cells are devices that convert solar energy into electrical energy. With the development of semiconductor technology, solar cell technology has also developed rapidly. [0004] Early solar cells used a combination of thermal diffusion and screen printing. The n-type diffusion layer is formed on the p-type silicon by thermal diffusion method. This method only uses thermal diffusion once, and the steps are simple, but it cannot effectively reduce the contact resistance, and cannot obtain higher ...

Claims

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Application Information

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IPC IPC(8): H01L31/18
CPCY02P70/50
Inventor 林志光吴月花
Owner HEJIAN TECH SUZHOU
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