Air blowout structure and air blowout unit for air-floating conveyor apparatus, and air-floating conveyor apparatus having the same

Abstract

Provided is an air blowout structure for an air-floating conveyor apparatus, which can be easily maintained. The air blowout structure for the air-floating conveyor apparatus conveys a glass substrate (4) as a thin plate by floating it pneumatically. The air blowout structure comprises a woven wire gauge (3) arranged in the highest portion of the structure, and a reinforcing member (2) having a porosity and arranged below the woven wire gauge (3). This woven wire gauge (3) can be exemplified by a plain-woven wire gauge, a twilled wire gauge, a plain-woven mat wire gauge or a twilled mat wire gauge. Moreover, the reinforcing member (2) has a single- or multi-layer structure.

Description

technical field [0001] The present invention relates to an air blowing structure and an air blowing unit of an air levitation conveyance device that suspends and conveys a thin plate such as a glass substrate for a liquid crystal display panel by air, and an air levitation conveyance device including these components. Background technique [0002] In the past, in the air blowing structure of the air levitation conveying device, in order to make the flow velocity or the flow rate of the air from the air blowing part (a plurality of blowing holes formed at predetermined intervals) of the air levitating conveying device uniform over the entire surface, A porous material is arranged on the lower surface side of the blowout hole in the upper wall member (refer to Patent Document 1, figure 1 , figure 2 ). [0003] The purpose of this upper wall member is to reinforce and protect a porous material that does not have rigidity and flatness. [0004] Figure 11 It is a schematic ...

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Problems solved by technology

[0005] However, in the conventional suspension transportation using the porous material 102 and the upper wall member 103, there is a problem that when the glass substrate 104 is broken, such as Figure 12 As shown, the maintenance work of removing the debris 105 of the damaged substrate and cleaning the upper wall member 103 is difficult.

Therefore, in the case of shortening the conveying time, when the conveying speed by the roller is increased, or the conveying speed is suddenly lowered, slippage occurs at the time of starting or stopping, and the positioning accuracy of the substrate is lowered, so there is a problem that it cannot be improved (raised) by the conveying speed. Acceleration and deceleration of substrate conveyance by rollers, making it difficult to shorten the conveyance time

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