Air blowout structure and air blowout unit for air-floating conveyor apparatus, and air-floating conveyor apparatus having the same
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- SINTOKOGIO LTD
- Publication Date
- 2010-07-14
- Estimated Expiration
- Not applicable · inactive patent
Smart Images
Figure 1 Figure 2 Figure 3
Abstract
Description
technical field
[0001] The present invention relates to an air blowing structure and an air blowing unit of an air levitation conveyance device that suspends and conveys a thin plate such as a glass substrate for a liquid crystal display panel by air, and an air levitation conveyance device including these components. Background technique
[0002] In the past, in the air blowing structure of the air levitation conveying device, in order to make the flow velocity or the flow rate of the air from the air blowing part (a plurality of blowing holes formed at predetermined intervals) of the air levitating conveying device uniform over the entire surface, A porous material is arranged on the lower surface side of the blowout hole in the upper wall member (refer to Patent Document 1, figure 1 , figure 2 ).
[0003] The purpose of this upper wall member is to reinforce and protect a porous material that does not have rigidity and flatness.
[0004] Figure 11 It is a schematic ...