Clamp ring cleaning protection and measuring jigs

Abstract

The invention relates to a clamp ring cleaning bottom protection jig, comprising a clamping surface support portion and a base, wherein the clamping surface support portion is provided with a top surface supporting the clamping surface bottom of the clamp ring, preferably, the clamping surface support portion is a clamping surface support ring; and the clamping surface support portion is arrangedon the base. The invention also relates to a clamp ring cleaning upper part protection jig, comprising a covering surface covering the upper part of the clamping surface of the clamp ring. The invention also relates to a clamp ring clamping surface height detection jig, comprising a base plate and a clamping surface bearing portion arranged on the base plate, wherein the clamping surface bearing portion is provided with an upper surface bearing the bottom of the clamping surface of the clamp ring; and the upper surface of the base plate is parallel with the upper surface of the bottom of the clamping surface. The jigs are skillfully designed, can greatly reduce loss of clamping surface height in the regenerative process, obviously increase the clamp ring cleaning times, lengthen the part replacement cycle of the client, solve the problems of low measuring efficiency of clamping surface height and comparatively expensive measuring jig and greatly lower the use and maintenance costs of the user, and is suitable for large-scale popularization and application.

Description

technical field [0001] The invention relates to the technical field of regenerative precision cleaning, in particular to the technical field of regenerative precision cleaning of an aluminum / copper chamber (AL / CU Chamber) in semiconductor technology, and specifically refers to a pressing ring cleaning protection and measuring fixture. Background technique [0002] Regenerative precision cleaning is to clean the residues generated by customers during use within the range of failure mode control, and restore the physical properties of the surface and interior of the device so that customers can use the device again; aluminum / copper chamber (AL / CUChamber) The clamping surface (chuck surface) of the inner edge of the clamp ring will produce a certain loss during the regeneration process. With the increase of the number of regenerations, the wear degree of the clamping surface will continue to increase, and eventually the clamping ring cannot be used normally. [0003] See figur...

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to overcome the shortcomings in the above-mentioned prior art, and provide a clamping ring cleaning protection and measuring fixture. The clamping ring cleaning protection and measuring fixture are ingeniously designed, and can greatly reduce the clamping surface height during the regeneration process. The loss of the compression ring is significantly improved, the replacement cycle of the customer's parts is extended, the problem of low measurement efficiency of the clamp surface height and the relatively expensive measurement fixture is solved, and the user's use and maintenance cost is greatly reduced. It is suitable for large-scale promotion and application.

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