Method and device for detecting micro foreign matter within transparent plate
A technology for transparent plates and foreign objects, which is used in measurement devices, optical devices, optical testing of flaws/defects, etc., which can solve the problems of high price, slow scanning speed, and large image data capacity.
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[0088]In order to confirm the effectiveness of the method for detecting minute foreign matter of the present invention or the device thereof, the device of the present invention was produced, and NiS and bubbles in the glass plate were detected. However, the present invention is not limited to the following embodiments. As the laser beam irradiating means, a Class 2 laser with a wavelength of 635 nm, an energy of 1 mW, a wide angle of 78 degrees, and the ability to adjust the focus and line width of the laser beam was used. The area scan camera as the imaging part is a 1 / 3-type IT system PS CCD, and a black and white camera module capable of outputting VAG-level (640×480 pixels) images at 60fps (frame persecond) is mounted on a monochrome camera module with a focal length of 50mm and a display brightness A lens with an F value of 2.8. The angle between the incident direction of the laser beam and the normal line of the glass plate is 50 degrees, the width of the laser beam is...
example 1
[0091] Figure 11 and Figure 12 Middle shows the images of NiS detected with inner beam I and inner beam II. As a glass plate, a glass plate having a size of 300 mm×300 mm, a plate thickness of 6.8 mm, and an elliptical NiS having a major axis of 120 μm and a minor axis of 100 μm at a depth of 2.3 mm from the non-irradiated surface was prepared. The depth is a value based on the focal depth of NiS observed with a microscope.
[0092] Figure 11 is an image of the bright spots and bright lines produced by the internal beam I. The uppermost line in the image is the bright line A formed on the front surface of the glass as the illuminated surface, the point below the bright line A is the bright spot E of NiS, and the line below the bright spot E is the bright line B formed on the back surface of the glass. The line below B is hard to see, but is the bright line C formed on the front of the glass by reflection from the back of the glass. From this image, it was confirmed tha...
example 2
[0097] Figure 13 and Figure 14 The middle shows images of detected bubbles using inner beam I and inner beam II. As a glass plate, a glass plate having a size of 50 mm×50 mm, a plate thickness of 3 mm, and bubbles with a diameter of 200 μm at a depth of 1.0 mm from the non-irradiated surface was prepared. The depth is a value based on the depth of focus of bubbles observed with a microscope.
[0098] Figure 13 is an image of the bright spots and bright lines produced by the internal beam I. The uppermost line in the image is the bright line A formed on the front side of the glass as the illuminated surface, the point below the bright line A is the bright spot E of the bubble, the line below the bright spot E is the bright line B formed on the back side of the glass, and the bright line The line below B is hard to see, but is the bright line C formed on the front of the glass by reflection from the back of the glass. From this image, it was confirmed that the depth of t...
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