Electric field auxiliary magnetic memory device and manufacture method thereof
A magnetic storage device, electric field-assisted technology, applied in information storage, recording information storage, instruments, etc., can solve problems such as technical difficulties, increase device energy consumption, etc., to reduce energy consumption, reduce writing magnetic field, and improve safety performance. Effect
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[0046] Deposit strontium ruthenate (SRO) with a thickness of 100 nm on strontium titanate (STO) as the bottom electrode layer 3 by physical vapor deposition, followed by depositing 200 nm of barium titanate (BTO) as the ferroelectric oxide layer by the same method 4. Deposit a 10nm Fe / Ni-based alloy thin film on the ferroelectric oxide layer 4 as the magnetic recording layer 5 by using the magnetron sputtering method, and there is a very thin oxide layer as the protective layer 6 on the layer. A DC operating voltage from 0 to 20V is applied between the strontium ruthenate (SRO) bottom electrode layer 3 and the magnetic recording layer 5 to form an operating electric field applied to the ferroelectric oxide layer 4 . The attenuation characteristic of the magnetic coercive field of the magnetic recording layer 5 with the increase of the voltage applied to the ferroelectric oxide layer 4 was studied by using the magneto-optical Kerr effect test system. Define the example sample w...
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