Decompression drying device

A decompression drying device and a ring-shaped technology, which is applied to the device for coating liquid on the surface, the pretreatment surface, the coating, etc., can solve the problem of uneven drying of the coating film, and achieve the effect of suppressing the uneven drying.

Active Publication Date: 2013-12-25
TORAY ENG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Then, drying is performed without any treatment, thereby having a problem of uneven drying on the coating film

Method used

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Examples

Experimental program
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Embodiment Construction

[0040] Embodiments of the present invention will be described with reference to the drawings.

[0041] Figure 1 to Figure 5 is a diagram schematically showing a reduced-pressure drying device according to an embodiment of the present invention, wherein, figure 1 It is a perspective view showing the state that the cavity cover 10 and the cavity main body 20 of the decompression drying device are separated; figure 2 is a top view of the cavity main body; image 3 is a diagram showing the cavity main body base 21; Figure 4 It is a partial cross-sectional view showing a state in which the substrate 1 is placed on the chamber main body 20; Figure 5 It is a diagram showing a state in which a substrate is accommodated in a reduced-pressure drying apparatus.

[0042] Such as Figure 1 to Figure 5 As shown, the reduced-pressure drying device is a device for drying a coating film such as a resist solution formed on a substrate 1 , and includes a chamber main body 20 (substrate ...

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PUM

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Abstract

The invention provides a decompression drying device, capable of preventing uneven drying on a base plate coating film. The decompression drying device comprises: a housing portion for housing the base plate; a base plate keeping portion for keeping the base plate at the preset position of the housing portion; an exhaust port arranged at the position opposite to the base plate center position kept by the base plate keeping portion and for exhausting the air of the housing portion; an annular suction port comprising an opening portion opening along the cirumferential edge of the base plate kept by the base plate keeping portion and formed by annular communication along the cirumferential edge of the base plate, wherein the exhaust port is communicated with the annular suction port and when suction force is generated by the exhaust port, the air in the housing portion is exhausted from the exhaust port by the opening portion.

Description

technical field [0001] The present invention relates to a reduced-pressure drying device for forming a coating film on a substrate by drying a coating liquid coated on the substrate under reduced pressure. Background technique [0002] In flat panel displays such as liquid crystal displays and plasma displays, a substrate on which a resist solution is applied (referred to as a coated substrate) is used. The coated substrate is produced by uniformly coating a resist liquid on a substrate with a coating device to form a coating film, and then drying the coating film with a reduced-pressure drying device. [0003] In this decompression drying apparatus, as shown in the following patent document 1, in the state where the substrate is accommodated in the accommodation portion in which the upper chamber and the lower chamber are formed, the atmosphere in the accommodation portion is exhausted from the exhaust port to reduce the air in the accommodation portion. pressure to dry th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B05D3/00
CPCB05C9/08B05C13/00B05D3/007
Inventor 奥田大辅
Owner TORAY ENG CO LTD
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