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Substrate transport device

A substrate conveying and substrate technology, applied in conveyors, conveyor objects, transportation and packaging, etc., can solve problems such as uneven drying

Inactive Publication Date: 2016-07-20
TORAY ENG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, if the back surface of the substrate is in contact with the roller, the drying state of the coating film applied on the substrate surface is different between the part that is in contact with the roller and the part that is not in contact with the roller, so there is a possibility of uneven drying.

Method used

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  • Substrate transport device
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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0054] figure 1 It is a plan view showing one embodiment of a substrate transfer device, figure 2 To enlarge the top view of a unit of the substrate conveying device, image 3 is a side view of a unit of the substrate conveying device, Figure 4 It is a front view of a unit of the substrate transfer device.

[0055] exist Figure 1 to Figure 4 Among them, the substrate transfer device 1 is a device that transfers the substrate 2 in a floating state, and is a device that transfers the substrate 2 from the upstream substrate processing device 1 to the downstream substrate processing device in the next step. For example, when a coating film is formed on the substrate 2 by a coating device that discharges a coating liquid such as a resist liquid, and then the substrate 2 is transported to a drying device that dries the coating film, the substrate supplied from the coating device can be 2. In a floating state, it is transported to the drying device without changing the direct...

Embodiment 2

[0091] In addition, refer to Figure 10 , Figure 11 Another embodiment of the substrate transfer device will be described. here, Figure 10 is a view looking down on a substrate guide 30 according to another embodiment from above, Figure 11 for Figure 10 A-A sectional view of . in the Figure 10 , Figure 11 In the illustrated embodiment, the air cushion 51 of the floating unit 50 is an example formed separately from the substrate abutting portion 34 of the substrate guide main body 31 . In addition, other configurations of the board guide 30 are the same as those in the above-mentioned embodiment, and thus description thereof will be omitted.

[0092] Such as Figure 10 , Figure 11 As shown, the substrate guide 30 includes: a substrate guide body 31 for constraining the substrate 2; a guide supporting portion 32 for supporting the substrate guide body 31; further comprising a floating unit 50 for guiding the substrate The part main body 31 floats from the loading tab...

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PUM

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Abstract

The invention relates to a substrate delivery device capable of preventing a coating film on a substrate from being uneven while the delivery of the substrate. In addition, the generation of particles is avoided even the divice is large in manufacturing and assembling error. The substrate delivery device conveys a substrate upfloated on the surface of an objective table towards the guiding edge of a guiding member for a substrate. The guiding member for a substrate comprises a main body used for restricting a substrate through abutting to the side surface of the substrate and capable of moving along the direction vertical to the surface of the objective table; a floating unit used for upfloating the surface from the surface of the objective table; and a deflection unit used for deflecting the main body of the guiding member towards the surface of the objective table.

Description

technical field [0001] The present invention relates to a substrate conveying device that floats and conveys a substrate from a stage. Background technique [0002] Conventionally, for example, in the technical field of photolithography for flat panel displays (FPD), a substrate transfer device that transfers a substrate from a substrate processing apparatus that performs a predetermined process to a substrate processing apparatus that performs a next step has been used. Among them, the floating substrate transfer device has an advantage of being able to shorten the cycle time because there is no operation for changing the posture of the substrate compared to a transfer device using a robot arm or the like. [0003] In a floating substrate transfer device, a substrate guide (transfer member) is generally included, and the substrate guide slightly floats the substrate by forming an air layer between the substrate and the stage by blowing air from the stage. Lift up and guide...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/677B65G51/03
CPCB65G47/911B65G49/065B65G51/03B65G2249/045H01L21/67784
Inventor 内泻外茂夫奥田大辅冈本俊一宫岛勇也姬野贵正
Owner TORAY ENG CO LTD
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