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OLED (Organic Light Emitting Diode) mask and application method thereof

A technology for masks and vapor deposition materials, applied in the field of masks, can solve the problems of decreased production efficiency, increased equipment processing time, increased masks, etc., and achieves improved production efficiency, simplified equipment structure, and the number of masks. reduced effect

Inactive Publication Date: 2010-09-15
IRICO DISPLAY DEVICES
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

These factors lead to an increase in the number of evaporation chambers in the equipment, an increase in the number of mask plates, and an increase in the processing time of the equipment due to multiple alignments, resulting in a decrease in production efficiency

Method used

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  • OLED (Organic Light Emitting Diode) mask and application method thereof
  • OLED (Organic Light Emitting Diode) mask and application method thereof

Examples

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Embodiment Construction

[0017] The present invention is described in further detail below in conjunction with accompanying drawing:

[0018] see figure 1 , 2, 3, a kind of OLED mask board, described mask board is horizontally provided with odd column groove group; Described groove group is made up of the groove arranged vertically; The distance between the groove group on the mask board is two Groove width; the distance between the nearest groove group from the transverse edge of the mask plate is one groove width.

[0019] Based on the application method of the OLED mask,

[0020] (1) In the same evaporation chamber, set the green evaporation material, red evaporation material and blue evaporation material in different evaporation units, and turn off the green evaporation material, red evaporation material and blue evaporation Evaporation unit baffles for materials;

[0021] (2) Align the mask plate with the substrate;

[0022] (3) Open the baffle plate of the green evaporation unit to conduct e...

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Abstract

The invention discloses an OLED (Organic Light Emitting Diode) mask and an application method thereof. The mask is transversely provided with odd number lines of groove groups consisting of longitudinally arrayed grooves; the distance between the groove groups on the mask is the width of two grooves; and the distance between the groove groups with a minimum transverse edge distance of the mask is the width of one groove. The method comprises the following steps of: firstly, evaporating a green evaporation material; aligning a substrate and the mask with a conventional method and then evaporating after the aligning is finished; in the same evaporating cavity, respectively placing three different evaporation materials in different evaporating units so as to be convenient for time-sharing work; after green evaporating is finished, moving the mask to a red aligning position through an aligning servo motor by utilizing a determined position relation to evaporate a red evaporation material, wherein at the moment, baffle plates of the green evaporating unit and a glue evaporating unit are in a closed state; and realizing the evaporating of a blue evaporation material in the same way. The invention greatly simplifies the equipment structure and reduces the quantity of the masks, and meanwhile, the production efficiency is greatly improved.

Description

[0001] Technical field: [0002] The invention relates to an evaporation process of an organic light-emitting device, and mainly relates to a mask used in the evaporation process of an OLED device and an application method thereof. Background technique: [0003] Organic Light Emitting Diode (OLED) has many advantages such as self-luminescence, fast response time, wide viewing angle, low cost, simple manufacturing process, good resolution and high brightness, and is considered to be an emerging application technology of the next generation of flat panel displays. In OLED technology, mask plate technology in vacuum evaporation is a very important and key technology, and the level of this technology directly affects the quality and manufacturing cost of OLED products. The usual three colors of red, green and blue are different due to different evaporation materials and different attachment positions of different materials on the substrate. The evaporation of red, green and blue...

Claims

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Application Information

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IPC IPC(8): C23C14/04C23C14/24
Inventor 韦清民
Owner IRICO DISPLAY DEVICES
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