Method for manufacturing holographic grating

Abstract

The invention discloses a method for manufacturing a grating with a low diffracted wave aberration on a grating substrate having aberrations. The method comprises the following steps of: forming a holographic record interference light field by a parallel light writing light beam and the other parallel light writing light beam with an adjustable wave surface; performing holographic exposure on a holographic record substrate; and performing development to obtain the needed grating. The method is characterized in that: a distorting lens is put into a divergent light path of one of the writing light beams, and the holographic record interference light field used for compensating the base aberration of the holographic grating is obtained by controlling the distorting lens. In the process, the distorting lens, a distorting lens controller and an interferometer form a closed-loop control and detection system of the holographic record interference light field; and the holographic record interference light field obtained after adjusting the distorting lens is used for exposing the holographic record substrate coated with a photosensitive material, recording the holographic grating, and performing the development to finish the manufacturing of the needed grating with the low diffracted wave aberration.

Description

technical field [0001] The invention relates to a method for preparing a diffraction optical element, in particular to preparing a holographic grating with low diffraction wave aberration on a large-scale optical substrate with aberration. Background technique [0002] Large-scale one-dimensional planar diffraction gratings are the key components of many large-scale high-tech engineering projects. In order to meet the requirements of the laser inertial confinement fusion system for laser energy technical indicators, the diffraction grating must be large in size and low in diffraction aberration. The grating production system usually consists of two parts: a holographic optical system and a recording substrate. The holographic optical system is used to generate a holographic recording interference light field. The recording substrate is coated with a photosensitive material. The interference fringes formed by interference are recorded by the photosensitive material, and then ...

AI Technical Summary

Problems solved by technology

For optical substrates that need to be coated with multi-layer dielectric films, the aberration of the substrate is likely to deteriorate further after coating, which brings great difficulties to the production of holographic gratings with low diffraction wave aberrations

Under the technical level of existing optical substrate processing, coating, and holographic optical recording, it is very difficult to manufacture meter-scale gratings and achieve their diffractive wave aberration indicators below 0.1 wavelength

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