Continuous coating material conveying device for linear metal coating evaporation source

A metal coating, linear technology, applied in vacuum evaporation coating, metal material coating process, sputtering coating, etc., can solve the problems of increasing the difficulty of vacuum degree and cleanliness in the coating area, increasing the coating space, etc. Improved vacuum and cleanliness, reduced space, improved uniformity

Inactive Publication Date: 2010-09-29
崔铮
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In addition, the array evaporation source also leads to an increase in the coating space, making it more difficult to maintain the vacuum and cleanliness of the coating area

Method used

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  • Continuous coating material conveying device for linear metal coating evaporation source
  • Continuous coating material conveying device for linear metal coating evaporation source
  • Continuous coating material conveying device for linear metal coating evaporation source

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Embodiment Construction

[0016] In the following, the specific implementation manners of the present invention will be further described in detail in conjunction with the accompanying drawings of the embodiments, so as to make the technical solution of the present invention easier to understand and grasp.

[0017] Such as figure 2 The cross-sectional structure of the metal thin film thermal evaporation system is shown. The present invention adopts a linear thermal evaporation source and a roller feeding device to cooperate with a substrate winding mechanism to realize large-area continuous technical coating.

[0018] The linear metal evaporation source is a strip-shaped open crucible 201, which reaches the melting evaporation temperature of the metal coating material through resistance heating or induction heating. And the length of the strip-shaped open crucible 201 matches the width of the base material, and is greater than or equal to the length of the roller feeding device 204 .

[0019] The rol...

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Abstract

The invention discloses a continuous coating material conveying device for a linear metal coating evaporation source. The device is arranged between the linear evaporation source and a hopper which are arranged in parallel. The continuous coating material conveying device is characterized in that the continuous coating material conveying device is a cylindrical feed roller which rotates around a central shaft, and a plurality of linear grooves are circumferentially distributed on the surface of the feed roller, wherein the toppling heights of the grooves of the feed roller are positioned above the linear heat evaporation source. The device of the invention can realize uninterrupted feed for the linear evaporation source, reduces a heat evaporation coating space, and is favorable for improving the vacuum and cleanness of an evaporation area. Moreover, the device replaces a plurality of evaporation sources in an array by using the single linear evaporation source so as to greatly simplify a system mechanism of the evaporation source at the same time of ensuring continuous and uniform deposition of a large-area base material.

Description

technical field [0001] The invention relates to a device for continuously conveying coating material which is a linear metal coating evaporation source, which can continuously transport the coating material in a hopper to the crucible of the linear evaporation source. The evaporation source cooperates with the substrate winding mechanism, which can realize the continuous evaporation of metal coating on the surface of a large-area substrate. Background technique [0002] Plating a metal film on the surface of a plastic film substrate, especially an aluminized film, has been widely used in the fields of packaging, decoration, anti-counterfeiting trademarks and making capacitors. Roll-to-roll thermal evaporation metal coating system is the basic equipment to achieve continuous coating of large-area plastic film substrates. The principle structure of the current winding thermal evaporation metal coating system is as follows: figure 1 shown. Among them, the metal coating evapo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/56C23C14/24
Inventor 崔铮
Owner 崔铮
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