High-precision adjustable-speed linear micro-displacement work table

Abstract

The invention discloses a high-precision adjustable-speed linear micro-displacement work table, belonging to the technical field of ultra-precise manufacture and detection, and in particular relating to a micro-displacement work table which realizes the high precision and the speed adjustment through the inverse piezoelectric effect and the friction micro-drive technology. The work table is provided with a micro-drive unit, a bearing plate, a guiding device and a basal body. The micro-drive unit is formed by combining a first piezoelectric ceramic drive, a second piezoelectric ceramic drive, a third piezoelectric ceramic drive, a first adjusting sheet, a second adjusting sheet, a third adjusting sheet, a plane triple flexible structure and a friction contact angle, wherein the first piezoelectric ceramic drive, the second piezoelectric ceramic drive and the third piezoelectric ceramic drive are parallel to each other and are coplanarly arranged; and a left ellipse flexible structure, a right ellipse flexible structure and a single-steady state flexible structure in the plane triple flexible structure and a four-footed flexible support beam are centrally and symmetrically arranged. Through the composite motion of the piezoelectric drive and the plane triple flexible structure, the invention realizes the micro-displacement technology with high precision, large stroke (theoretically maximum stroke without limitation), large load, adjustable step pitch and response frequency, and high electro-mechanical transformation efficiency, and can meet different use requirements in fields of precise manufacture, detection and micro-operation.

Description

technical field [0001] The invention belongs to the technical field of ultra-precision manufacturing and detection, and in particular relates to a high-precision, speed-adjustable micro-displacement worktable realized by inverse piezoelectric effect and friction micro-drive technology. Background technique [0002] More and more piezoelectric ceramic materials are used at home and abroad to realize micro-displacement drive, and PZT piezoelectric ceramics are mostly used. The driver made of piezoelectric ceramic material laminations has the advantages of high response frequency and high adjustment accuracy. It is very small, without self-locking, and usually cannot adjust the micro-step distance, and the application range of industrial precision machining is restricted. The existing micro-motion workbench mainly has a double-layer structure, that is, two layers of thickness and thickness. The fine workbench is driven by piezoelectric ceramics, while the coarse workbench is d...

AI Technical Summary

Problems solved by technology

[0003] The technical problem to be solved by the present invention is: under the advantage of ensuring high precision and fast response of the piezoelectric ceramic material driving, aiming at the shortcomings of the existing micro-displacement workbench, the planar triple compliant mechanism realizes simple structure, small volume, electromechanical A micro-motion system with high conversion efficiency can produce a large stroke (theoretical maximum stroke is unlimited), adjustable speed and fast response, and can carry a large load of micro-displacement, while minimizing the control complexity

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