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Universal device and method for analyzing impurities in high-purity non-corrosive gas

A non-corrosive, general-purpose device technology, applied in measurement devices, analytical materials, material separation, etc., can solve problems such as difficult separation and detection, various types of impurity gas components, and inability to detect impurities in high-purity non-corrosive gases.

Inactive Publication Date: 2010-12-15
SHANGHAI XUANYI ELECTRONICS TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Moreover, due to the high content of bottom gas in high-purity non-corrosive gas and the variety of impurity gas components, it is difficult to detect trace impurity components.
These impurity components are easily covered by the high concentration of bottom gas, and it is difficult to separate and detect accurately
[0005] In addition, different high-purity non-corrosive gases, especially oxygen and other gases, have different analysis and detection components and methods. Existing equipment such as a single gas chromatograph cannot perform various high-purity non-corrosive gases on the same set of equipment. Detection requirements of impurities in gas

Method used

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  • Universal device and method for analyzing impurities in high-purity non-corrosive gas

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Effect test

Embodiment 1

[0053] like Figure 1 to Figure 8 As shown, a general-purpose device for analyzing impurities in high-purity non-corrosive gases includes an impurity component separation gas circuit, a helium ionization detector and an oxygen pre-separation gas circuit.

[0054] The impurity component separation gas path includes the first auxiliary carrier gas stabilization system 101, the second auxiliary carrier gas stabilization system 102, the sample gas inlet 105, the sample gas outlet 106, the exhaust outlet A109, and the six-way valve with purge. 2. Sample loop A301, four-way valve with purge A5, four-way valve with purge B6, analytical chromatographic column A401, analytical chromatographic column B402, analytical chromatographic column C403 and zero dead volume three-way valve 8;

[0055] The oxygen pre-separation gas circuit includes ten-way valve 7 with purging, the third auxiliary carrier gas steady flow system 103, the fourth auxiliary carrier gas steady flow system 104, the sam...

Embodiment 2

[0067] When detecting impurity components in high-purity non-corrosive gases (such as nitrogen) other than oxygen, the steps are as follows:

[0068] (1) Sampling: if figure 1 As shown, first switch the six-way valve with purge 2 to state two, that is, the first passage 201 is connected to the sixth passage 206, the second passage 202 is connected to the third passage 203, and the fourth passage 204 is connected to the fifth passage 205; At this time, the four-way valve A5 with purge is switched to state one, that is, the first passage 501 is connected to the fourth passage 504, and the third passage 503 is connected to the second passage 502; the four-way valve B6 with purge is switched to state two , that is, the first path 601 is connected to the fourth path 604, and the second path 602 is connected to the third path 603;

[0069] At this time, the sample gas inlet 105, the sample loop 301 and the sample gas outlet 106 are connected, and the sample gas flows into the sampl...

Embodiment 3

[0079] When detecting impurity components in high-purity oxygen, the steps are:

[0080] (1) Sampling: if Figure 5 As shown, switch the ten-way valve with purge 7 to state two, and connect the oxygen inlet, sample loop B and oxygen outlet;

[0081] (2) Sampling and separation of oxygen: such as Image 6 As shown, switch the ten-way valve with purge to state one, switch the four-way valve with purge A5 to state two, switch the four-way valve with purge B6 to state two; at this time, connect the fourth auxiliary carrier gas steady flow System 104, sample ring B302, oxygen adsorption column 404, analytical chromatographic column E405, analytical chromatographic column B402, and analytical chromatographic column C403; auxiliary carrier gas IV blows the gas in the sample ring B into the oxygen adsorption column 404, and oxygen is absorbed by the oxygen adsorption column ;

[0082] The oxygen adsorption column can catalyze the reaction and absorb oxygen, which can avoid some imp...

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Abstract

The invention discloses a detection device and a method of gas and discloses a universal device and a method for analyzing impurities in high-purity non-corrosive gas. The separated detection can be realized by switching a valve and changing the flowing direction of gas. The invention has the advantages of simple structure, simple, convenient and quick analysis process and favorable separation effect of the impurities; in addition, the invention can carry out the on-line detection; and the analysis demand on various high-purity non-corrosive gases can be finished by the same device.

Description

technical field [0001] The invention relates to a gas detection device and method, in particular to a general device and method for analyzing and detecting impurities in high-purity non-corrosive gas. Background technique [0002] When analyzing high-purity non-corrosive gases, it is not only necessary to detect the content of the gas itself (bottom gas), but also to analyze the impurity gas components contained in it. [0003] The above-mentioned impurity components include various macromolecular and small molecular gases, with many types, different contents, and large molecular weight differences. Therefore, during analysis and detection, the components need to be separated one by one before analysis. [0004] Moreover, because the content of base gas in high-purity non-corrosive gas is extremely high and there are many types of impurity gas components, it is difficult to detect trace impurity components. These impurity components are easily covered by high-concentration ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N30/02G01N30/20
Inventor 薛翔
Owner SHANGHAI XUANYI ELECTRONICS TECH