Three-dimensional micro confocal measuring system and method utilizing optical polarization characteristic

A measurement method and measurement system technology, applied in the field of three-dimensional microscopic confocal measurement system, can solve problems such as the inability to meet the needs of high precision and rapid detection

Active Publication Date: 2010-12-29
IND TECH RES INST +1
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Problems solved by technology

Existing contact or non-contact measurement methods can no longer meet the market's demand for high-precision and rapid detection

Method used

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  • Three-dimensional micro confocal measuring system and method utilizing optical polarization characteristic
  • Three-dimensional micro confocal measuring system and method utilizing optical polarization characteristic
  • Three-dimensional micro confocal measuring system and method utilizing optical polarization characteristic

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Embodiment Construction

[0067] In order to have a further understanding and understanding of the characteristics, purpose and functions of the present invention, the relevant detailed structure and design concept of the device of the present invention will be explained below, so that the review committee can understand the characteristics of the present invention, in detail The description states the following:

[0068] The invention provides a three-dimensional microscopic confocal measurement system and method, which is aimed at measuring the microstructure surface topography with high transparency and large inclination angle. High-frequency information, combined with the principle of focused shape measurement, is used for global measurement.

[0069]The invention provides a three-dimensional microscopic confocal measurement system and method. When the measurement tilt angle increases, the intensity of reflected light received by the image sensing unit and the contrast of the structured light in th...

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Abstract

The invention provides a three-dimensional micro confocal measuring system and method utilizing the optical polarization characteristic. The invention is characterized by generating structured light with patterns by grating plates and then matching with polaroid elements and the structured light drift step and combining with the focus morphology measuring principle to extract a series of optical images corresponding to different depth relative to an object, then utilizing the focusing index values of a plurality of pixels in each acquired optical image to form focusing reaction curves of the pixels and finally computing the peak value of the focusing reaction curve of each pixel and carrying out recombination according to the depth corresponding each peak value to acquire the morphology of the object.

Description

technical field [0001] The invention relates to a surface topography measurement technology, in particular to a three-dimensional microscopic confocal measurement system and method for measuring the surface topography of an object in a confocal manner. Background technique [0002] With the maturity of Nano / Micro-electromechanical system (NMEMS) technology, the industry's demand for micro-component detection continues to increase, and measurement equipment and technology are also constantly innovating. Existing contact or non-contact measurement methods can no longer meet the market's demand for high-precision and rapid detection. Furthermore, due to the continuous transformation of the industry in recent years, the demand for various production equipment, such as: automated optical inspection equipment, is also increasing. Compared with the traditional method of using manual inspection, automation is carried out through machine assistance. Advanced visual inspection can ef...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/25
Inventor 陈亮嘉郭世炫陈圣涵张奕威王浩伟
Owner IND TECH RES INST
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