Electric arc titanium pump and vacuum air pump group comprising same

Abstract

The invention is applies to the technical field of vacuum acquisition and discloses an electric arc titanium pump and a vacuum air pumping group comprising the same. The electric arc titanium pump comprises a pump shell, a trapping plate, a cathode arc source member and a power supply, wherein the trapping plate is arranged on the inside wall of the pump shell, the cathode arc source member is fixedly arranged in the pump shell, and the pump shell and the cathode arc source member are in cylindrical shapes and are coaxially arranged; and the vacuum air pumping group comprises a vacuum chamber, wherein a molecular pump, a prepump, a roughing pump and the electric arc titanium pump are connected to the vacuum chamber. The electric arc titanium pump can be used for leading atoms steamed by the cathode arc source member to form an active film with even thickness and increasing the utilization rate of the cathode arc source member, thereby increasing pumping speed and air-pumping flow rate and reducing energy consumption and operation cost. The vacuum air pumping group can be used for replacing the current large-size diffusion pump with high energy consumption and high oil-vapor pollution and a Lobed pump air-pumping group in order to clean vacuum, save pumping energy consumption and reduce operation cost.

Description

technical field [0001] The invention belongs to the technical field of vacuum acquisition, and in particular relates to an arc titanium pump and a vacuum pumping unit comprising the arc titanium pump. Background technique [0002] At present, the arc titanium pump forms a thin layer of active atoms by evaporating the cathode target on the cathode arc source component to the collector plate, and the thin layer of active atoms reacts with gas molecules to achieve the pumping effect. In the prior art, the arc titanium pump adopts a planar cathode arc source structure, and the distance between the catch plate and the cathode arc source is uneven. In this way, the titanium film on the part near the catch plate to the cathode arc source is thicker, and the distance from the cathode arc source is relatively thick. The thinner titanium film on the farther part of the source member results in: [0003] At lower pressure (≤5×10 -3 Pa) During operation, at the thicker film layer, the...

AI Technical Summary

Problems solved by technology

[0003] At lower pressure (≤5×10 -3 Pa) During operation, at the thicker film layer, the titanium atoms are covered by the subsequent evaporated titanium atoms without sufficient reaction, resulting in waste of titanium materials and increased operating costs

Operating at higher pressure, the thinner part of the titanium film cannot meet the pumping requirements, and the pumping speed is significantly reduced. The measured results show that: 5×10 -2 The pumping speed of Pa is only 5×10 -3 20% of Pa pumping speed, reduced pumping speed and pumping flow of arc titanium pump

[0004] In addition, the poor heat dissipation and temperature rise of the gas collection plate of the arc titanium pump in the prior art lead to a decrease in the probability of the thin layer of active atoms adsorbing gas molecules, which further reduces the pumping speed and pumping flow rate of the pump.

Images