Orthogonal angle extracting method with two-dimensional line interval
An extraction method and line spacing technology, which is applied in the field of orthogonal angle extraction of two-dimensional line spacing, can solve problems such as inappropriateness and large aspect ratio, and achieve the effect of reducing errors
Inactive Publication Date: 2012-05-23
SHANGHAI INST OF MEASUREMENT & TESTING TECH +1
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Problems solved by technology
Due to the large aspect ratio of the 2D line spacing, it is inappropriate to directly use the multi-angle scanning method to extract the orthogonal angles
Method used
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[0041] The present invention is a method for extracting orthogonal angles between two-dimensional lines, comprising the following steps:
[0042] 1. Determine the vertical direction in the orthogonal direction of the two-dimensional line interval to be measured as the direction to be measured;
[0043] 2. Think of the two-dimensional line interval as consisting of Figure 4 1D line spacing composed of the structures shown;
[0044] 3. Use measuring equipment to take any reference direction as the benchmark, with Figure 5 The direction of the structure shown is the angles a1 and a2 where the reference deflection is very small, and the sampling curves of the line intervals are obtained by scanning the line interval samples respectively, as shown in Figure 6 , 7 shown;
[0045] 4. Use Fourier transform to extract the frequency of the sampling curve, and calculate the lengths l1 and l2 of the line intervals at angles a1 and a2;
[0046] 5. Calculate the angle a according to...
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The invention relates to an orthogonal angle extracting method with a two-dimensional line interval. The method is characterized by comprising the following steps of: determining the longitudinal direction to be a direction to be measured; taking a two-dimensional line interval as a one-dimensional line interval along a longitudinal repetitive structure; taking any reference direction as a datum and acquiring sampling curves of the line interval respectively along the longitudinal direction with smaller deflection angles a1 and a2; extracting the frequencies of the sampling curves by using Fourier transform and calculating the lengths l1 and l2 of the line interval on the angles a1 and a2; figuring out an angle according to a formula, which is the inclined angle of the longitudinal direction and the reference direction; determining the transverse direction as a direction to be measured; figuring out an angle b which is the inclined angle of the transverse direction and the reference direction by the same steps; and determining the inclined angle of the orthogonal direction of the two-dimensional line intervals according to the formula c= the absolute of (b-a) to finish measuring. The invention can quickly determine the orthogonal direction of the two-dimensional line interval and reduce the errors of measured values of a two-dimensional line interval pitch and two axial inclined angles, which are brought by angle deviations.
Description
technical field [0001] The invention relates to a method for extracting an orthogonal angle in the field of two-dimensional line interval measurement, and in particular discloses a method for extracting an orthogonal angle for a two-dimensional line interval. Background technique [0002] As a standard sheet commonly used in the fields of semiconductors and precision processing, line spacing is mainly used for the measurement and control of micro-nano pitch and line width, as well as the calibration and traceability of the length and angle of related micro-nano measuring instruments. Line-spaced templates are uniformly distributed with identical structures in orthogonal directions, such as figure 1 As shown, the application is mainly the average distance between two adjacent identical structures. Abbe's theory points out that the smaller the angle deviation between the measurement direction and the direction to be measured, the closer the measurement result is to the true v...
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IPC IPC(8): G01B21/22G01B21/02
Inventor 刘一陈民森李源
Owner SHANGHAI INST OF MEASUREMENT & TESTING TECH